- Research Article
- 10.1117/1.oe.64.12.124102
Sideways lensless imaging using single-shot digital holography
- Dec 16, 2025
- Optical Engineering
- Beñat Gutiérrez-Cañas Pazos + 2 more +2
Quality assurance typically involves off-line process monitoring because the geometry of fabrication processes often does not allow for in-process measurement. Usually, the direct view of the process area is blocked by processing devices. We therefore propose a concept using lensless digital holography for off-axis full-field measurements. We use a phase space representation to elucidate the requirements for this concept and to address the challenges concerning illumination and sampling. Our method enables aberration-free sideways imaging with high observation angles, allowing for freedoms concerning the camera positioning for in-line process monitoring. Our simulations with off-axis angles up to 45 deg and experiments with angles up to 37 deg indicate that the approach presented here offers an effective solution for in-line control in spatially restricted production environments.
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