Cameca (France)

Abstract Imec has developed a fully-functional integrated forksheet field-effect transistors (FETs), which is the most promising architecture for advancing beyond the GAA (Gate-All-Around) nanosheet generation for scaling and performance improvements past the 2nm technology node. From a manufacturing perspective, forksheet devices are extremely complex to process and requires accurate and sensitive analytical instruments like the AKONIS SIMS tool.

The high lateral resolution and sensitivity of the NanoSIMS 50 and 50L series of dynamic SIMS instruments has enabled numerous scientific advances over the past 25 years. Here we report on the NanoSIMS-HR, the first major upgrade to the series, and analytical tests in a suite of sample types, including an aluminum sample containing silicon crystals, microalgae and plant roots colonized with arbuscular mycorrhizal fungi. Significant improvements have been made in the Cs ion source, high voltage (HV) control, stage reproducibility, and other aspects of the instrument that affect performance. The modified design of the NanoSIMS-HR thermal-ionization Cs source enables a 5-pA primary ion beam to be focused into a 100 nm spot, a ~2.5-fold increase compared to Cs sources on previous instruments (~2 pA at 100 nm). The brightness of the new Cs source enables an ultimate lateral resolution as high as 30 nm and improved detection limits for a given analysis area. Sample stage movement accuracy is higher than 500 nm, enabling many-fold higher throughput automated analyses. With the new HV control, the primary ion beam impact energy can be reduced from 16 keV to 2 keV, which enables higher depth resolution during depth profiling (a 2-fold improvement), albeit with a 5-fold decrease in lateral resolution. In the NanoSIMS-HR, the secondary ion column and detection system are identical to those used in the previous series, and isotopic analysis performance is as precise as in previous NanoSIMS instruments.

Recent research has provided new information on the impact of COVID-19 and previous pandemics on the mental health of healthcare professionals (HCP). Several studies have found that HCP are greatly affected by pandemics and may develop anxiety disorders, mood disorders, and posttraumatic stress disorder. The stress caused by the intense working conditions and the fear of contracting and transmitting the virus are major vulnerability factors for these workers, increasing their risk of developing a mental health condition. It is therefore essential to provide appropriate support to this population in order to reduce and avoid the psychological burden of the current pandemic on their mental health. Considering the data previously published on the COVID-19 pandemic and past epidemics, the present article aims to provide an epidemiological review of the psychological impact of a pandemic on healthcare professionals. Furthermore, it examines, from a theoretical perspective, whether EMDR early interventions (EEI) may constitute an effective solution in order to provide psychological support to HCP in hospitals. Lastly, the article will identify various protocols for EEI, which, it argues, should be the approaches of choice for providing early support following a potentially traumatic event.

This work explored quantitative analyses of SiGe layers, either grown on bulk Si wafers or in a confined space of different dimensions within the N28 node technology. Dynamic secondary ion mass spectrometry (SIMS) measurements were performed with a magnetic sector CAMECA IMS Wf, using low impact energy O2+ sputtering and recording the Ge containing molecular ions. It was concluded that the molecular ions protocol, called “self-focusing” SIMS, is capable of providing an accurate characterization of SiGe composition with Ge content up to 90%.

Offering high sensitivity, depth profiling and ion imaging capabilities together with high throughput, dynamic secondary ion mass spectrometry (SIMS) proves extremely useful for a wide range of nuclear science applications. The CAMECA IMS 7f/7f-Auto is a versatile magnetic sector SIMS well suited for such applications. In this work, various examples of material analyses that are of interest for nuclear science are presented: depth profiling of the xenon and mapping of contaminants in CeO2, in-depth distribution of iodine in SiC using the energy filtering technique for improving the I detection limit, and depth profiling analysis of molybdenum in UO2 using eucentric sample rotation for minimizing surface roughness development (thus improving data quality).

For a better comprehension of hydrogen intercalation of graphene grown on a silicon carbide substrate, an advanced analytical technique is required. We report that with a carefully established measurement procedure it is possible to obtain a reliable and reproducible depth profile of bi-layer graphene (theoretical thickness of 0.69 nm) grown on the silicon carbide substrate by the Chemical Vapor Deposition method. Furthermore, we show that with depth resolution as good as 0.2 nm/decade, both hydrogen coming from the intercalation process and organic contamination can be precisely localized. As expected, hydrogen was found at the interface between graphene and the SiC substrate, while organic contamination was accumulated on the surface of graphene and did not penetrate into it. Such a precise measurement may prove to be invaluable for further characterization of 2D materials.

Journal Article Using Ma ss Resolving Power as a Performance Metric in the Atom Probe Get access Fred Meisenkothen, Fred Meisenkothen National Institute for Standards and Technology, Gaithersburg, MD U.S.A Search for other works by this author on: Oxford Academic Google Scholar Thomas F Kelly, Thomas F Kelly CAMECA Instruments, Inc., Madison, WI U.S.A Search for other works by this author on: Oxford Academic Google Scholar Edward Oltman, Edward Oltman CAMECA Instruments, Inc., Madison, WI U.S.A Search for other works by this author on: Oxford Academic Google Scholar Joseph H Bunton, Joseph H Bunton CAMECA Instruments, Inc., Madison, WI U.S.A Search for other works by this author on: Oxford Academic Google Scholar Ludovic Renaud, Ludovic Renaud CAMECA SA, Gennevilliers, France Search for other works by this author on: Oxford Academic Google Scholar David J Larson David J Larson CAMECA Instruments, Inc., Madison, WI U.S.A Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 22, Issue S3, 1 July 2016, Pages 680–681, https://doi.org/10.1017/S1431927616004256 Published: 25 July 2016

The isotopic composition of different materials can be imaged by secondary ion mass spectrometry. In biology, this method is mainly used to study cellular metabolism and turnover, by pulsing the cells with marker molecules such as amino acids labelled with stable isotopes (15N, 13C). The incorporation of the markers is then imaged with a lateral resolution that can surpass 100 nm. However, secondary ion mass spectrometry cannot identify specific subcellular structures like organelles, and needs to be correlated with a second technique, such as fluorescence imaging. Here, we present a method based on stimulated emission depletion microscopy that provides correlated optical and isotopic nanoscopy (COIN) images. We use this approach to study the protein turnover in different organelles from cultured hippocampal neurons. Correlated optical and isotopic nanoscopy can be applied to a variety of biological samples, and should therefore enable the investigation of the isotopic composition of many organelles and subcellular structures.