- Book Chapter
- 10.1002/9781119417651.ch2
Electron Spectrometer Design
- Aug 30, 2019
- John F Watts + 1 more +1
The design and construction of electron spectrometers is a complex undertaking and will usually be left to one of the handful of specialist manufacturers worldwide, although many users specify minor modifications to suit their own requirements. The various modules necessary for analysis by electron spectroscopy are (in addition to a sample): a source of the primary beam (either X-rays or electrons), an electron energy analyser and detection system, all contained within a vacuum chamber, and a data system, which is an integral part of the instrument. Most commercial spectrometers are based on vacuum systems designed to operate in the ultra-high vacuum in a particular pressure range, and most X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES) experiments are carried out in this pressure range. There are two types of electron energy analyser in general use for XPS and AES: the cylindrical mirror analyser and the hemispherical sector analyser.
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