- Conference Article
- 10.1109/rfit65667.2025.11364585
600-GHz Scalable Modular CMOS Detector Arrays with Stitched Multiple Chips
- Aug 25, 2025
- Jae-Sung Rieh + 2 more +2
Terahertz detectors are a key component for terahertz imaging, where detector arrays are preferred over single-pixel detectors for reduced scan time and potential for real-time imaging. While a lager pixel count is often desired for arrays, there is a limit on the maximum number of pixels that can be included in a semiconductor chip array. In this work, to overcome the pixel count limit, multi-chip technique has been applied for 600-GHz CMOS detector arrays, in which adjacent chips are stitched with wire-bonds for control and detection signal transfer. Two types of detector arrays have been developed and their electrical characteristics as well as the acquired 600-GHz test images are presented.
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