Kunshan Industrial Technology Research Institute

This paper deals with the new method that makes micro-holes with electrodeposition photoresist (EDPR) as a sacrificial layer. The EDPR was deposited on a silicon-mold made by ICP-RIE. Ni film was plated on a silicon-mold covered with EDPR. Etched through a gap between a silicon-mold and the Ni film, the Ni film came off from the silicon-mold. As a result, we could make Ni films that have micro hole of 9.2µm in diameter, and 56µm in depth on an experimental basis, and verified the silicon-mold that lateral faces of columns did not bare scratch marks. Moreover, the circularity roundness was able to fill 1.5µm which was the specification of the printer nozzle.

We prepared gold-titania composite nanoparticles by the gas condensation method, and evaluated their physical and optical characteristics. The structure of obtained particles mainly showed that the gold particles, whose diameter ranged from 10 to 60 nm, were covered with spherical titania particles which were composite phases of anatase and rutile. The effect on the crystal structure and shapes of titania was not clearly observed by compounding with gold.

In this article, a strategy for automatic hazard analysis of batch process and the integrated automatic hazard analysis systems are proposed. The suggested process models for hazard analysis are based on multimodeling approach, which aims the improvement of the effectiveness and efficiency of reasoning process by cooperation of multiple models. According to the multimodeling concept, four process representation models, including operational, material, behavioral and functional knowledge bases, and four hazard inference algorithms are established. For a case study, a batch pharmaceutical process is tested and a maloperation analysis is performed, and the case study showed more successful capture of hazard information using the devised analysis system than the traditional systems

Si_3N_4 ceramics were prepared by hot-pressing method and investigated the behavior of high temparature oxdation. Four kinds of spesimens were treated at 1300℃ in air enveronment for 1OOhour to 2000hour. The characteristics of spesimens were as follows. a) Si_3N_4 added 8wt% Y_2O_3. b) Si_3N_4 added 5wt% Y_2O_3 and 3wt%Al_2O_3. c) Si_3N_4/SiC added 8wt% Ya_2O_3. d) Si_3N_4 /SiC added 5wt% Y_2O_3 and 3wt%Al_20_3. The main concludions are as follows. 1) Ox'layer of SN-Y5A3 was most thick and SNS-Y8 was most thin. 2) Relationship between the thickness of ox'layer and heat treatment time followed paraboric law in all spesimens. 3) The diffusion zone inside ox'layer of spesimens added Y_2O_3 and Al_2O_3 was very depth. 4) Crystalline phase of the surface were mainly SiO_2 and Y_2Si_2O_7.

Deposition and dissolution mechanism of lithium on the aluminum substrate has been investigated by electrochemical impedance spectroscopy (EIS) and x-ray photoelectron spectroscopy (XPS). Every impedance diagram obtained during deposition and dissolution periods consists of two loops. The diameter of the high-frequency loop is almost constant regardless of the amount of deposition or dissolution, while the magnitude of the low-frequency loop decreases with increasing deposition period, and increases with increasing dissolution period. XPS results showed a surface film, which consists of an outer LiF layer and an inner LiOH-Li2O layer, forms on the Li-Al alloy. Thickness of the LiOH-Li2O layer increases with dissolution period. The mathematical analysis of a model mechanism suggests that the high-frequency loop of the impedance diagram may correspond to both the charge-transfer resistance and the resistance of the LiF layer. The low-frequency loop may comprise the diffusion process of Li+ in the LiOH-Li2O layer, the coverage relaxation of the adsorbed species Liads and Li+ ads, and the alloying process of Li-Al.

Intensity changes of secondary ions from Poly (methyl methacrylate) (PMMA) with ion bombardment has been investigated by time-of-flight secondary ion mass spectrometry (TOF-SIMS). The “dose profiles” of several ion species, which were recorded as intensity variations versus primary ion dose, were observed. It was found that the profile have various tendencies over a range of ion dosage from 1012 to 2×1014 ions/cm2. By using a high mass resolution TOF-instrument, the closely located mass peaks such as C3H7+ and C2H3O+ at 43 amu were found to show different intensity change for different ion dosages. The relationship between the observed secondary ion intensities and bond breaking was discussed with referenced to the bond orders obtained by a semi-empirical MO calculation. It was found that the secondary ion formation reflects the bond strength of the analyzed polymer and the stability of the formed ions, and that the rearrangement processes may also have some influences on the detected ion intensities.