LLA Instruments (Germany)

Author Summary: Near infrared chemical imaging was used for the quantitative determination of the application weight of hot-melt adhesive layers laminated to polyether-based polyurethane (PUR) foam as well as for monitoring of its spatial distribution across the surface of the foam. Adhesive layers were applied as melt-spun fibrous webs of a thermoplastic polyester with application weights between about 20 g m–2 and 130 g m–2. In spite of the coarsely porous surface structure of the foam, RMSEP was found to be 3.8 g m–2 only. Chemical images of the adhesive layers revealed that a minimum of two adhesive webs corresponding to an application weight of about 40 g m–2 are required for the formation of a continuous layer without holes. Average application weights derived from the chemical images have shown an excellent correlation with gravimetric reference values.

A fast technique for micro analytical characterization of glass and tool steel is now available.

The ability to rapidly turn data into information is a necessity in the semiconductor industry. Furthermore, the ability to analyze and correlate yield results to electrical test results and in-process data is essential in the overall yield enhancement effort. The need exists to have a centralized database to store all aspects of engineering data, and analysis tools that will communicate with the database. KLA obtained the rights to Motorola's engineering database (Synergy) and analysis software (EDAS/sup TM/) and now markets it as Discovery/sup TM/. The Discovery system provides the capability of storing all probe results, in-process, equipment and SPC data, as well as bitmap and defect die level summary information. In addition, EDAS provides basic analytical software capabilities specifically for the semiconductor industry. MOS-13 and KLA partnered in the installation of Discovery into Motorola's newest fab, MOS-13. The goal was to implement an engineering database and analysis system to provide engineering with centralized access to needed data and analytical software that would assist them in their needs. Electrical test, and Probe bin, characterization, and bitmap die level summary data are currently being loaded into the Discovery database. The Discovery database, EDAS, and a newly created reporting tool have become an essential part of MOS-13.