- Research Article
5
- 10.1063/1.4799654
Tip-based chemical vapor deposition with a scanning nano-heater
- Apr 01, 2013
- Applied Physics Letters
- Angelo Gaitas
In this preliminary effort, a moving nano-heater directs a chemical vapor deposition reaction (nano-CVD) demonstrating a tip-based nanofabrication (TBN) method. Localized nano-CVD of copper (Cu) and copper oxide (CuO) on a silicon (Si) and silicon oxide (SiO2) substrate from gasses, namely sublimated copper acetylacetonate (Cu(acac)2), argon (Ar), and oxygen (O2), is demonstrated. This technique is applicable to other materials.
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