- Conference Article
2
- 10.23919/mikon54314.2022.9924970
Iterative Learning Control for Impedance Matching Network
- Sep 12, 2022
- Grzegorz Palesa + 3 more +3
Impedance matching circuits are used in plasma processing systems to adjust a complex impedance of plasma chamber to standardized value $- 50 \Omega$. However, this unusual application introduces several challenges for impedance matching circuit, like: wide changes of load impedance related to plasma ignition or changes of load impedance in accordance to power delivered to the vacuum chamber. On top of that, there is a distinct drive to reduce time required to reach nominal VSWR to lowest possible value. Thus, to address this issue a proposal of Iterative Learning Control (ILC) algorithm for impedance matching circuit was introduced.
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