Thermo Fisher Scientific (Czechia)

Abstract In advanced DRAM and NAND structures, the feature size at the targeted cut face during the Focused Ion Beam (FIB) process has been reduced to sub-ten nanometer scale. Even with high-quality SEM resolution level scanned cut-face image data, determining the stopping point of the process remains a significant challenge. To address this, Micron has successfully implemented cut-face probability calculation and sliced image data interpolation methods using machine vision image artificial intelligence platforms (AIPs by Thermo Fisher Scientific) for the Micron’s latest memory devices analysis. This innovation enables machines to render a device’s three-dimensional geometry, infer and predict the upcoming cut face in SEM data points, and determine the stopping point in the FIB thinning process using detector’s raw data signal extractions. This approach avoids signal post-processing and transformation into visible light range for humans, thereby preventing meaningful data loss. The new methodology surpasses human eye detection limits, maximizes SEM resolution utilization, and converts an automation system into an autonomous system capable of deciding where to stop the FIB milling at each cut-face, based on the sensory input of Micron wafer’s cut-face analysis and learning algorithms. This technology has been integrated into its associated FIB platform, augmented by Open-AutoTEM, (iFast Extensibility). Micron defines this autonomous FIB thinning as active auto thinning (AAT), distinguishing it from the conventional fiducial-based FIB auto thinning, known as passive auto thinning (PAT).

Abstract Presentation slides for the ISTFA 2025 Tutorial session “Correlative In-Situ AFM-in-SEM Technique for Advanced Semiconductor Failure Analysis and Material Characterization.”

Li-ion batteries are essential for applications like electromobility and stationary energy storage, where long-term performance and safety are critical. While previous studies have explored degradation mechanisms in Li-ion cells, detailed insights into structural changes during extended cycling remain limited. This study aims to investigate the degradation mechanisms in a Samsung 18650 cylindrical Li-ion cell over 800 cycles (10 % to 90 % State of Charge) to understand performance fade and structural changes. Utilizing periodic micro-CT scans, we observed significant geometric alterations in the electrode stack, including delamination and bending towards the cell axis, correlating with capacity loss. Post-mortem analyses using broad ion beam (BIB), scanning electron microscopy (SEM), energy-dispersive spectroscopy (EDS), and synchrotron CT confirmed voids in the cathode active material, copper deposition on the anode surface, and elevated levels of phosphorus and fluorine, likely from electrolyte decomposition and SEI layer formation. These insights shed light on the structural changes and failure modes in cylindrical Li-ion cells during prolonged cycling and highlight the need for design improvements and optimized manufacturing processes to enhance mechanical robustness and reduce defects, thereby extending battery cycle life and safety. • Delamination and bending in the electrode stack highlight the need for improved mechanical robustness. • Void formation and NMC grain cracking call for better cathode deposition processes to enhance structural integrity. • Unexplained copper deposition on the anode surface suggests need for further study to refine cycling protocols, • Active material expansion causes electrode cracking and capacity loss, emphasizing the need for design adaptations.

Abstract Presentation slides for the ISTFA 2024 Tutorial session “Correlative Microscopy: In-Situ AFM-in-SEM Introduction, Capabilities, and Case Studies Semiconductor Materials and Batteries.”

BackgroundCryo-electron tomography has emerged as a valuable technique for visualizing proteins and protein complexes in their natural cellular environment.To achieve high-resolution imaging, the preparation of thin cryo-lamellae containing the region of interest is a critical step.However, the usual methods for lamella preparation are often time-consuming and require the use of several applications, presenting challenges for inexperienced users in the cryotomo workflow.

Tri-beam microscopes comprising a fs-laser beam, a Xe+ plasma focused ion beam (PFIB) and an electron beam all in one chamber open up exciting opportunities for site-specific correlative microscopy. They offer the possibility of rapid ablation and material removal by fs-laser, subsequent polishing by Xe-PFIB milling and electron imaging of the same area. While tri-beam systems are capable of probing large (mm) volumes providing high resolution microscopical characterisation of 2D and 3D images across exceptionally wide range of materials and biomaterials applications, presenting high quality/low damage surfaces to the electron beam can present a significant challenge, especially given the large parameter space for optimisation. Here the optimal conditions and artefacts associated with large scale volume milling, mini test piece manufacture, serial sectioning and surface polishing are investigated, both in terms of surface roughness and surface quality for metallic, ceramic, mixed complex phase, carbonaceous, and biological materials. This provides a good starting place for those wishing to examine large areas or volumes by tri-beam microscopy across a range of materials.

Journal Article Innovative In-situ Workflow for Battery Sample Analysis using AFM-in-SEM Get access Veronika Hegrová, Veronika Hegrová NenoVision s. r. o., Brno, CZ Corresponding author: veronika.hegrova@nenovision.com Search for other works by this author on: Oxford Academic Google Scholar Radek Dao, Radek Dao NenoVision s. r. o., Brno, CZ Search for other works by this author on: Oxford Academic Google Scholar Aleksandr Kondrakov, Aleksandr Kondrakov Battery and Electrochemistry Laboratory, Institute of Nanotechnology, Karlsruhe Institute of Technology, Eggenstein-Leopoldshafen, DEBASF SE, Ludwigshafen, DE Search for other works by this author on: Oxford Academic Google Scholar Ute Heinemeyer, Ute Heinemeyer BASF SE, Ludwigshafen, DE Search for other works by this author on: Oxford Academic Google Scholar Libor Novák, Libor Novák Thermo Fisher Scientific Brno s. r. o., Brno, CZ Search for other works by this author on: Oxford Academic Google Scholar P Zakopal, P Zakopal Thermo Fisher Scientific Brno s. r. o., Brno, CZ Search for other works by this author on: Oxford Academic Google Scholar Jan Neuman Jan Neuman NenoVision s. r. o., Brno, CZ Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 1320–1321, https://doi.org/10.1093/micmic/ozad067.676 Published: 22 July 2023