Ushio (Germany)

Abstract This paper presents the design, capabilities, and recent experimental outcomes of the EBL2 extreme ultraviolet (EUV) beamline research facility developed at TNO for advanced nanolithography component testing. The facility delivers high-brightness 13.5 nm EUV radiation with pulse powers up to 4.2 W (measured from 5 to 22 nm in the exposure chamber) and integrates a suite of in situ metrology tools within a controlled gas environment such as X-ray photoelectron spectroscopy (XPS), nulling ellipsometry, thermal infrared imaging, and EUV photodiodes. These tools enable real-time, non-destructive characterization of photomasks and pellicles under EUV and EUV-induced plasma exposure. The paper details the system’s architecture and highlights its suitability for accelerated lifetime testing. Recent results include the identification of degradation mechanisms in Ru–Ta absorber materials, EUV-induced oxidation in multilayer mirrors, and the absence of radiation-induced outgassing in SiN pellicles. The combination of EUV intensity mapping, ellipsometry and XPS has proven particularly effective in correlating optical and chemical surface changes. These findings support the development of robust materials for next-generation EUV lithography.

This study investigates the steepness of the heterostructure interface between the p-side optical-waveguide and electron blocking layer (EBL) in ultraviolet-B (UV-B) laser diodes (LDs), focusing on the impact of growth temperature. The results revealed that lowering the growth temperature significantly reduced the thickness of the “unintended compositionally graded layer” a diffusion layer formed at the interface through solid-phase diffusion. However, a bottleneck also existed in LDs with extremely steep interfaces, where the diode characteristics could not be obtained due to the device's high resistance. This study highlights the trade-off between the steepness of the interfaces in the AlGaN heterostructure and diode performance, indicating the need for further optimization to achieve high-performance UV-B LDs. Specifically, future efforts should focus on refining growth conditions to reduce impurity concentrations resulting from low-temperature growth and controlling the thickness of individual layers, such as the EBL, to address high resistance and achieve high-performance UV-B LDs.

We have developed a novel approach for the fabrication of 6G communication antenna substrates by directly sputtering a copper seed layer onto a resin with low dielectric properties and low adhesiveness, without relying on a metal adhesion layer such as titanium. This study presents a detailed analysis of the effects of two surface modification methods—vacuum ultraviolet (VUV) irradiation and oxygen plasma treatment—performed before sputtering the copper seed layer on the interfacial structure between a cycloolefin polymer (COP) film and copper plating layer. Using scanning transmission electron microscopy, energy-dispersive x-ray spectroscopy, and selected area electron diffraction, we confirmed that both surface modification methods promote the formation of polycrystalline Cu2O at the interface between the COP film and the copper plating layer. VUV irradiation enhances the smoothness of the COP surface, resulting in the uniform distribution of hydrophilic functional groups. These functional groups stably interact with the sputtered copper, leading to the oxidation of copper during annealing and the formation of a consistent Cu2O layer. In contrast, oxygen plasma treatment selectively etches regions of the COP surface with high oxygen affinity, creating fine structures and concentrating the hydrophilic functional groups in the recessed areas. After sputtering, copper interacts with these localized functional groups, and during annealing, limited diffusion causes the copper to oxidize and aggregates into a Cu2O particle structure. Thus, this study demonstrates that the structures of polycrystalline Cu2O formed at the interface vary depending on the surface modification methods and elucidates the mechanisms behind these differences through analysis of surface morphology and the distribution of functional groups induced by each method.

This study clarified the association between the amount of physical activity and apathy after one year among community-dwelling older adults. Two hundred community-dwelling older adults (mean age: 74.3±5.0 years old, female: 52.5%) who participated in the 2018 and 2019 "Kasama Longevity Health Examination" were included. Apathy was assessed using the Apathy Scale (0-42 points; the higher the score, the lower the motivation), physical activity by Physical Activity Scale for the Elderly (PASE), and Geriatric Depression Scale-15 (GDS). The 2018 PASE data were grouped into tertiles. A multiple regression analysis was performed with the 2019 Apathy Scale as the dependent variable and the 2018 PASE as the independent variable, and the sex, age, years of education, economic situation, body mass index, chronic illness, smoking history, alcohol drinking habits, physical function, cognitive function, GDS, and the 2018 Apathy Scale as adjustment variables. The PASE subcategories (leisure-time, household, and work-related activities) were examined using a similar method. The mean Apathy Scale in 2019 was 14.0±6.2 for the low physical activity group, 12.8±6.0 for the medium physical activity group, and 10.1±5.9 for the high physical activity group. The high physical activity group showed a significant negative association with the Apathy Scale (B=-1.56, 95% confidence interval=-2.91 to -0.21, p=0.023). No association was found for any activity of the PASE sub-items. A high level of physical activity may protect against apathy among community-dwelling older adults.

The most critical enabler of actinic patterned mask inspection technology/capability has been the EUV source. In this paper, we discuss the performance and reliability improvements achieved for the LDP EUV Source (Laser-assisted Discharge Produced Plasma EUV Source) used in Intel actinic patterned-mask inspection systems. These improvements encompass several critical aspects such as EUV emission conversion efficiency, source lifetime and debris mitigation effectiveness. Optimization of the parameters that influence LDP discharge has enabled improvement to these performance indicators. Duration of continuous operation of the source has been extended by novel modification of the electrode design as well as other changes. Ion induced damage to the optical components such as downstream mirrors was mitigated by development of an effective debris mitigation approach. These improvements have significantly increased the duration of uninterrupted operation, EUV brightness level, as well as improvements in plasma stability.

The purpose of this study was to clarify contents of social supports provided by elite athletes to collegiate athletes, and to investigate the intentions of sport commitment for collegiate athletes focusing on the influence of elite athletes’ social support. Participants were 350 Japanese collegiate athletes (male: 270, female: 80, Age M=19.43±1.14). First, we developed a scale for assessing Japanese elite athletes’ social support behavior. The scale employed 2 factors (instrumental support and emotional support) and 10 items, and validity and reliability of the scale was confirmed. Secondly, we examined the relationship among elite athletes’ social support and intention of sports commitment in collegiate athletes, and the results indicated that both instrumental support and emotional support affected athletic identity, and athletic identity formed sport commitment for collegiate athletes. In addition, the results demonstrated that instrument support from elite athletes had a greater effect on collegiate athlete’ s athletic identity than emotional support. From the results, this study has clarified the features of social supports provided by elite athletes, and has shown the effectiveness of the intention of collegiate athlete’ s sport commitment.

Caveolin (Cav)-enriched lipid raft (C/LR) microdomains play an important role for regulating insulin signaling and endothelial function; however underlying mechanisms is incompletely understood. Vascular extracellular superoxide dismutase (ecSOD), a secretory copper (Cu) enzyme synthesized from vascular smooth muscle cells (VSMCs), preserves nitric oxide (NO)-mediated endothelial function by reducing extracellular superoxide anion (O2•-) levels. We previously demonstrated that Cu transporter ATP7A is required for full activity of ecSOD and that both ecSOD and ATP7A are found in C/LR. However, the functional significance of ATP7A-ecSOD pathway in insulin signaling and C/LR remains unknown. Here we show that in organoid culture of mouse aorta, insulin stimulation increases ecSOD specific activity (47%) and ATP7A expression. In cultured VSMCs, insulin stimulation promotes ATP7A translocation to the C/LR (1.7 fold) where ecSOD is activated by ATP7A through their binding. Furthermore, insulin stimulation promotes ATP7A association with Cav1 as shown by immunofluorescence and co-immunoprecipitation assay. Specific activity of ecSOD, but not Cu/Zn SOD, is significantly decreased (60%) in aorta of Cav1 knockout (KO) mice, indicating that Cav1 or C/LR is required for full ecSOD activity. Of note, ATP7A expression is decreased in aorta from Cav1 KO mice or Cav1-depleted VSMCs with siRNA, which is due to enhanced ATP7A ubiquitination. These results suggest that Cav1 binding to ATP7A at C/LR protects ATP7A from proteosomal degradation, thereby increasing ecSOD activity. Functionally, NO-dependent vasorelaxation induced by acetylcholine, but not NO-independent relaxation induced by sodium nitroprusside, is impaired in mesenteric arteries of Cav1 KO mice vs. wild type mice (P<0.05), which is associated with overproduction of O2•- in the vessels and rescued by gene transfer of ecSOD. In summary, Cav1 plays an essential role for insulin-induced full ecSOD activation by regulating ATP7A translocation and expression. Our studies will provide novel insights into the Cav1-ATP7A-ecSOD axis as a potential therapeutic target for promoting endothelial function against oxidative stress-dependent cardiovascular and metabolic diseases.