Zeon (Japan)

ABSTRACT Technical Presentation: Providing a general answer regarding the danger posed by particles to the reliable function of electronic assemblies, particularly in High Voltage (HV) applications, is challenging. Simple particle counting and size measurements only indicate their presence, not necessarily their risk. In this webinar, Freddy Gilbert will outline typical expectations regarding the behavior of metallic and non-metallic particles, especially in HV applications, and demonstrate a method for meaningful risk assessment: • Differentiation between metallic and non-metallic particles and their anticipated impacts on electronic assemblies • Risk assessment through frit voltage analysis • Practical insights: Review of field cases Speaker Bio: Freddy Gilbert studied Material Sciences and Engineering at the Graduate School of Engineering of the University of Montpellier and the Technical University of Berlin. He currently works as Senior Technology Analyst in the Reliability & Surfaces team of ZESTRON. He organizes and conducts Technology Coachings and Analyses with the focus on reliability of electronics against humidity-related failure mechanisms and contamination-induced failures. On Demand Webinar

The performance of previous generation material (ZER02#1) were reported at EUVL symposium in 2019. Despite the good performance, the stability issue at development process and the incompatibility of special organic solvents with customer’s Fab requirements led to be difficult its further developments and scaling up. Therefore, Zeon developed a novel ZER02#3 resist by changing monomers and polymer properties in order to keep the EUV adsorption at the same level of ZER02#1 and introduce common organic solvents as developer. The lithographic performance of dense Line-Space (L/S) pattern and of contact holes (C/H) pattern with ZER02#3 resist is presented. For L/S pattern, a resolution of 16 nm half pitch was achieved at the exposure dose of 54.2 mJ/cm2, giving a biased LWR of 4.1 nm and a biased LER of 2.6 nm by NXE3300. For hexagonal C/H pattern, 40 nm pitch was resolved at 72.4 mJ/cm2, with a LCDU of 3.1 nm by NXE3300. ZER02#3 could enhance sensitivity as keeping lithography performance with ZER02#1. In addition to the enhancement of the lithographic performance achieved, fundamental studies such as Gel Permeation Chromatography were realized to better understand the pattering mechanism under EUV exposure.

We will introduce a new type ¼‐wave plate film (QWP) for OLED displays. This QWP film has two layers with positive and negative intrinsic properties, which result in smaller reflectance and smaller color shift in all directions than other type of conventional QWP. It will be evaluated versus conventional films used in OLED panels.

Earlier studies have shown that the B haplotype has a significant influence on the protective efficacy of vaccines against Marek's disease (MD) and that the level of protection varies dependent on the serotype of MD virus (MDV) used in the vaccine. To determine if the protective glycoprotein gene gB is a basis for this association, we compared recombinant fowlpox virus (rFPV) containing a single gB gene from three serotypes of MDV. The rFPV were used to vaccinate 15.B congenic lines. Nonvaccinated chickens from all three haplotypes had 84%-97% MD after challenge. The rFPV containing gB1 provides better protection than rFPV containing gB2 or gB3 in all three B genotypes. Moreover, the gB proteins were critical, since the B*21/*21 chickens had better protection than chickens with B*13/*13 or B*5/*5 using rFPV with gB1, gB2, or gB3. A newly described combined rFPV/gB1gEgIUL32 + HVT vaccine was analyzed in chickens of lines 15 x 7 (B*2/*15) and N (B*21/*21) challenged with two vv+ strains of MDV. There were line differences in protection by the vaccines and line N had better protection with the rFPV/gB1gEgIUL32 + HVT vaccines (92%-100%) following either MDV challenge, but protection was significantly lower in 15 X 7 chickens (35%) when compared with the vaccine CVI988/Rispens (94%) and 301B1 + HVT (65%). Another experiment used four lines of chickens receiving the new rFPV + HVT vaccine or CVI988/Rispens and challenge with 648A MDV. The CVI 988/Rispens generally provided better protection in lines P and 15 X 7 and in one replicate with line TK. The combined rFPV/gB1gEgIUL32 + HVT vaccines protected line N chickens (90%) better than did CVI988/Rispens (73%). These data indicate that rFPV + HVT vaccines may provide protection against MD that is equivalent to or superior to CVI988/ Rispens in some chicken strains. It is not clear whether the rFPV/gB1gEgIUL32 + HVT vaccine will offer high levels of protection to commercial strains, but this vaccine, when used in line N chickens, may be a useful model to study interactions between vaccines and chicken genotypes and may thereby improve future MD vaccines.

Clean room air contains many kinds of contaminants such as moisture and organic compounds. The device performance is influenced by them, therefore, Si wafers should not be exposed to clean room air. We have developed the next generation Si wafer transfer/stock system using out-gas free advanced resin and CDA (Clean Dry Air). The advanced resin has various advantageous properties for a Si wafer transfer box and stocker. For example, (1) out-gas free, (2) light weight, (3) high transparency, (4) high strength, etc. Using the advanced resin, we have developed a new Si wafer transfer pod, called BORP (Bottom Opening Removal Pod).

Bacillus sphaericus DR-1-189[pBHB5022] was found to have an electron transport chain including at least three cytochromes with absorption maxima at 552, 563, and 602 nm, which were reduced by succinic acid, NADH, or NADPH. Electron transport inhibitors such as antimycin A, 3,3′,5′-triiodo-L-thyronine and 1-(2′-thenoyl)-3,3,3-trifluoroacetone (TTFA), blocked this electron transport, with resultant inhibition of cell growth and of biotin synthesis by the cells. When DR-1-189[pBHB5022] was mutagenized to yield mutants resistant to TTFA, the amounts of cytochrome 552 and those of biotin secreted increased in proportion to the extent of resistance of cells to TTFA. A mutant resistant to 250 μg/ml of TTFA produced 48 mg biotin per liter in a medium containing pimelic acid. These results suggest that biotin production by B. sphaericus DR-1-189[pBHB5022] is closely related to its electron transport chain.