Processes of formation of intermetallic phases in functional coatings deposited by cold gas-dynamic sputtering of Ni - Al, Ni - Ti - Al, Ti - Al and Ni - Ti powder mixtures are studied. In heating of the coatings containing Al, the main phase transformations occur in the range of 450 - 750 °C; the processes of phase formation in the coatings based on the Ni - Al and Ni - Ti - Al systems develop in a similar manner. In the Ni - Ti coatings, transformations do not develop in the temperature range studied. The phase transformations in the coatings are identified.