• Home
  • Search
  • A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System
  • Cite Icon92
  • https://doi.org/10.1109/tsm.2017.2788501Copy DOI Icon

A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System

Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

Accurate prediction of cycle time (CT) plays an important role in the promises of a good delivery-time for semiconductor manufacturers. However, the CTs of wafer lots are difficult to forecast since they are influent by a lot factors (e.g., workload for every machine). The identification of key factors (called CT-related) can not only improve the prediction performance but also facilitate the control of CT, which is of particular significance. This paper focuses on gathering subtle variables into the candidate variables set along with the further analysis which is required in the correlation analysis between various candidate factors and CTs of wafer lots. The candidates set is first constructed to collect all factors that may affect wafer lots’ CT. Then, a regression-based model is proposed to select CT-related variables, which consists of three parts: 1) discretization; 2) adaptive logistic regression-based correlation analysis; and 3) CT-related factor selection. Subsequently, a parallel computation model is implemented to forecast the CTs of wafer lots. In the numerical experiments, 108 CT-related factors stood out from 774 candidates and replaced six global factors (used as reference) to predict CTs of wafer lots. The results indicated that the proposed approach had higher accuracy than linear regression and back propagation network in CT forecasting in large scale data analysis.

Similar Papers
  • Book Chapter
  • Citations20

Comparison of Dispatching Rules for Reducing the Mean and Variability of Cycle Times in Semiconductor Manufacturing

  • Jan 01, 2000
  • Manfred Mittler +1
  • PDF
  • Research Article
  • Citations21

An Iterative Procedure for Optimizing the Performance of the Fuzzy-Neural Job Cycle Time Estimation Approach in a Wafer Fabrication Factory

  • Jan 01, 2013
  • Mathematical Problems in Engineering
  • Toly Chen +1
  • PDF
  • Research Article
  • Citations31

A Hybrid Approach Combining Fuzzy c-Means-Based Genetic Algorithm and Machine Learning for Predicting Job Cycle Times for Semiconductor Manufacturing

  • Aug 12, 2021
  • Applied Sciences
  • Gyu M Lee +1
  • PDF
  • Research Article
  • Citations36

Accurate prediction of machining feedrate and cycle times considering interpolator dynamics

  • Jun 18, 2021
  • The International Journal of Advanced Manufacturing Technology
  • Rob Ward +3
  • Research Article
  • Citations34

An improved Genghis Khan optimizer based on enhanced solution quality strategy for global optimization and feature selection problems

  • Aug 05, 2024
  • Knowledge-Based Systems
  • Mahmoud Abdel-Salam +4
  • Conference Article
  • Citations10

Genetic algorithm for sampling from scale-free data and networks

  • Jul 12, 2014
  • Pavel Krömer +1
  • Research Article

Web 上の大規模データの解析による Moon & Spencer の色彩調和論における「美度」の妥当性の検証

  • Jul 06, 2019
  • JOURNAL OF THE COLOR SCIENCE ASSOCIATION OF JAPAN
  • なお 吉賀 +1
  • Conference Article
  • Citations18

TriC: Distributed-memory Triangle Counting by Exploiting the Graph Structure

  • Sep 22, 2020
  • Sayan Ghosh +1
  • Book Chapter
  • Citations2

Automated Identification and Tracking of Nephrops norvegicus (L.) Using Infrared and Monochromatic Blue Light

  • Jan 01, 2016
  • Frontiers in artificial intelligence and applications
  • Garcia Jose Antonio +3
  • Conference Article
  • Citations23

Analyzing Invariants in Cyber-Physical Systems using Latent Factor Regression

  • Aug 10, 2015
  • Marjan Momtazpour +4
  • Research Article
  • Citations15

An ANN-based load model for fast transient stability calculations

  • Aug 11, 2005
  • Electric Power Systems Research
  • Ai Qian +1
  • Research Article
  • Citations44

Using exploratory regression to identify optimal driving factors for cellular automaton modeling of land use change.

  • Sep 22, 2017
  • Environmental Monitoring and Assessment
  • Yongjiu Feng +1
  • Conference Article
  • Citations3

Understanding how social discussion platforms like Reddit are influencing financial behavior

  • Nov 01, 2022
  • Sachin Thukral +6
  • Front Matter

BETTER4U: Insights for Charting the Future of Personalized Obesity Prevention.

  • Feb 22, 2026
  • Obesity reviews : an official journal of the International Association for the Study of Obesity
  • Maria Kafyra +3
  • Conference Article

Multi-core based Parallel N-path labeling HKM clustering algorithm

  • Jul 01, 2013
  • Kaiyang Liao +3
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.