A laboratory package for training in vacuum technology

Vacuum technology has been vital for the progress in almost every field of modern industrial & scientific research and technological developments. Research in this field is therefore important for the rapid progress in other sophisticated technologies. The modern society require precise know-how of vacuum metrology for its complex and sophisticated manufacturing processes and research activities. Accuracy in vacuum measurements is therefore an essential need for every application. The required accuracy is achieved with the help of well-calibrated vacuum gauges and this is possible only, if there exist proper vacuum standards of required range and accuracy. In this paper, a brief review of recently developed different vacuum standards, namely Standard Mercury Manometer, Standard Volume Expansion System and Standard Orifice Flow System will be presented, employed for the calibration of low, medium and high vacuum gauges respectively. Our recently developed standards are simple in design, least in vibration & degassing rate with desired accuracy, ease of operation and cost effective.

The Tokamak Fusion Test Reactor (TFTR) vacuum system has been designed using conventional ultrahigh vacuum (UHV) components and technology. This report describes the rationale and motivation that went into its design. Mercury diffusion pumps were selected over other existing high vacuum pumps. A system of four pumps is designed to provide a base pressure of less than or equal to 8 x 10/sup -6/ Pa and a low impurity level within the torus. These features will be accomplished without in situ bakeout, but the system will be pre-baked before final assembly and periodically discharge cleaned during operation. Bakeout of the total vacuum system has been omitted in the initial design because it is believed that satisfactory conditions of the walls can be obtained without it. However, bakeout is being considered as a design alternative. Calculated spectra of mass to charge (M/e) ratios obtained from the residual gas analyzers (RGA's) to be used in the vacuum system forelines are presented. These spectra indicate the ability of the RGA's to monitor the tritium content of the vacuum system. The requirements for vacuum seals on TFTR are enumerated and the reasons for selecting flat copper washer seals are given. Also included is a brief summary of initial experimental studies on the Zr/Al-type getters to be used to pump hydrogen isotopes. The report concludes with a discussion of in situ bakeout, a method of reaching bakeout temperatures, and problems related to such operations.

Paul Aveling Redhead, one of the founders of vacuum technology and surface science, died on 9 July 2005 in Ottawa, Canada, after a long battle with heart disease. Born on 25 May 1924 in Brighton, England, Paul received his BA from Cambridge University in 1944 and joined the British Department of Naval Ordnance, where he worked on tubes for microwaves and proximity fuses. After World War II, he undertook research on experimental vacuum tubes for the Services Electronics Research Laboratories. He was awarded an MA from Cambridge in 1948 for that work; in 1969 he received his PhD from Cambridge.In 1947 Paul joined the division of radio and electrical engineering of the National Research Council of Canada in Ottawa to develop key radar components. Until 1970 he led a distinguished team at NRC in establishing the methods and basis of both ultrahigh vacuum technology—which was to have such impact in many areas, including particle accelerators—and the field of surface science. After a three-year stint in research planning for NRC, he became director of the division of physics in 1973. He believed that the management of science was an important responsibility of scientists. In his last three years at NRC before retirement, he was a key member and secretary of the science and technology policy committee. He also served for many years on the NRC management committee, its tactical committee, the advisory board of TRIUMF, and the advisory committee for fusion-related research. He officially retired from NRC in 1986 but continued to work from an office there.Paul will be remembered for his groundbreaking research in the generation, measurement, and utilization of ultrahigh vacuum, research that paved the way for many other developments in surface science. With NRC colleagues Peter Hobson and Ernie Kornelsen, he coauthored the classic book The Physical Basis of Ultrahigh Vacuum (Chapman and Hall, 1968), the defining book in that field. He developed the magnetron gauge for reliable measurement down to pressures of 10−14 torr, and one version of that gauge went to the Moon in the Apollo missions. He also developed thermal desorption spectroscopy and laid the foundation for electron stimulated desorption. In 1975, he received the American Vacuum Society’s Medard W. Welch Award “in recognition of outstanding current research in the fields of vacuum science and technology, vacuum metallurgy, thin films, and surface science.” He also received the Queen Elizabeth Jubilee Award in 1977 and the Medal for Lifetime Achievement in Physics in 1989, both from the Canadian Association of Physicists. Paul served as president of AVS in 1967–68 and as editor of the Journal of Vacuum Science and Technology from 1970 to 1975. In 1970, he was awarded honorary membership in AVS. He continued to serve the society in many roles, including as both editor and author in recording historical events that he considered important: Vacuum Science and Technology: Pioneers of the 20th Century (AIP, 1994), History of the American Vacuum Society 1953–1994 (AVS, 1995), and 50 Years of Science, Technology, and the AVS (1953–2003), a special issue of the Journal of Vacuum Science and Technology A, 2003.The depth of the impact that Paul had over his career is so remarkable that he has left a tangible imprint on a wide range of scientific and technical endeavors involving the use and understanding of high vacuum. There are entire fields of science and generations of scientists that are dependent on Paul’s contributions to the technology of making high vacuum in the laboratory.During his prolific career as a scientist, technical manager, and historian, Paul had the opportunity to be a mentor for many of his colleagues. We count ourselves privileged members of that group because we had the opportunity to learn from him as our paths crossed in various conferences, committees, collaborations, coauthored papers, and unforgettable chats over a glass of beer. We were very fortunate to have Paul join us in a celebration of his contributions to our scientific community in a special “Symposium to Honor Paul Redhead” organized for the annual AVS symposium in October 2000. He agreed to that celebration if we promised to avoid anything that bordered on being pompous. We could never be pompous when talking about Paul—only grateful. Paul Aveling Redhead NRCPPT|High resolution© 2006 American Institute of Physics.

Ultimate pressure of a well-designed vacuum system very much depends on pretreatments, processing and procedures [1, 2]. Until now much attention has been paid to minimizing hydrogen outgassing from the vacuum chamber wall materials, however, procedures and processing deserve further scrutiny. For reducing the gas load, high sensitivity helium leak detection techniques with sensitivities better than 1×10−12 Torr l/sec should be used. Effects that are induced by vacuum instrumentation need to be reduced in order to obtain accurate pressure measurements. This paper presents the current status of the CEBAF DC photogun. This state of the art technology is driving the need for Extreme High Vacuum (XHV). We also present sensitive helium leak detection techniques with RGA's, vacuum gauge and RGA calibration procedures, metal sponges for cryosorption pumping of hydrogen to XHV, low cost surface diffusion barriers for reducing the hydrogen gas load and clean assembly procedures. Further, alternative backing pump systems based on active NEGs [3] for turbo molecular pumps are also discussed.

Vacuum gauge calibration by the static method

1.1 International vacuum standardisation

A combined approach to the calibration of vacuum gauges is described. It is based on the principle of expansion and pumpdown methods. Two chambers V1 and V2 are connected by conductance Ck. Gas is first expanded into V1 (expansion method), admitted into V2 via Ck, and then pumped away through an orifice of conductance C2. The pressure P2 in V2 decreases exponentially (pumpdown method). A formula for computing P2 is given. Calibration of a Bayard–Alpert type ionization gauge has been carried out in the range 10−4–5×10−7 Torr (1.3×10−2–6.7×10−5 Pa). Possible experimental errors are discussed. A total uncertainty of about 5.2% has been estimated.

The Indian Vacuum Society (established in 1970) has organized a symposium every alternate year on various aspects of vacuum science and technology. There has been considerable participation from R & D establishments, universities and Indian industry in this event. In view of the current global scenario and emerging trends in vacuum technology, this year, the executive committee of IVS felt it appropriate to organize an international symposium at Tata Institute of Fundamental Research, Colaba, Mumbai 400 005 from 29–30 November 2007. This symposium provided a forum for exchange of information among vacuum scientists, technologists and industrialists on recent advances made in the areas of large vacuum systems, vacuum production, its measurement and applications in industry, and material processing in vacuum. Vacuum science and technology has made vital contributions in high tech areas like space, high energy particle accelerators, large plasma systems, electronics, thin films, melting and refining of metals, extraction and processing of advanced materials etc.The main areas covered in the symposium were the production and measurement of vacuums, leak detection, large vacuum systems, vacuum metallurgy, vacuum materials and processing inclusive of applications of vacuum in industry. Large vacuum systems for high energy particle accelerators, plasma devices and light sources are of special significance for this symposium. Vacuum evaporation, hard coatings, thin films, joining techniques, sintering, melting and heat treatment, furnaces and thermo dynamics are also covered in this symposium. There were eighteen invited talks from the best experts in the respective fields and more than one hundred contributed papers. This fact itself indicates the interest that has been generated amongst the scientists, technologists and industrialists in this field. In view of the industrial significance of the vacuum technology, an exhibition of vacuum and vacuum processing related equipments, accessories, products etc by different manufacturers and suppliers has been organized at the venue of the symposium hall for the benefit of the participants. The interest shown by the exhibitors reveals that the industry has come of age and the advances that have taken place over the years is quite significant.During the symposium, the Indian Vacuum Society felicitated two distinguished personalities who have contributed significantly for the development of vacuum science and technology in the country. The C AMBASANKARAN memorial and Smt SHAKUNTALABAI VYAWAHARE memorial Awards were also conferred on the two best contributed papers. A committee constituted by the Symposium Organizing Committee evaluated the relevance, scientific content, and clarity of presentation to decide the award winning papers. It is hoped that the discussion generated by the delegates at the symposium will help in a better understanding vacuum science and technology. K C Mittal Convener S K Gupta Co Convener Kakodkar, Anil DAE/India, Chairman Badve, Cdr A.V.(IN Retd.) Pfeiffer Vac India Banerjee, S. BARC/India Bhandari, R.K. BRNS/India Chander, Shekhar CEERI/India Chopra, K.L. IIT Delhi/India Day, Chris ITER Grover, R.B DAE,BARC/India Jakub, Szajman VSA/ Australia Jayaraj, R.N. NFC/India Kamath, H.S. BARC/India Kaw, P.K. IPR/India Kobayashi, M. VSJ/Japan Kumar, Lalit MTRDC, India Kumar, Vikram NPL., India Langley, Robert AVS, USA Larour, Jean Ecole/France Mendonsa, R.H. Lawrence and Mayo Myneni, Ganapatirao Jlab/USA Narsaiah, S.V. HHV Padamsee, Hasan Cornell/USA Pillay, R.G. TIFR Raj, Baldev IGCAR/India Raju, P.T. IVS/India Ramasami, T. DST/India Ray, A.K. BARC/India Reid, RJ IUVSTA/UK Roy, Amit IUAC/india Sahni, V.C. RRCAT, BARC/India Schamiloglu, E. UNM/USA Shankara, K.N. VSSC,ISRO/India Sinha, Bikash VEC,SINP/India Strubin, P. CERN/Switzerland Ray, A.K. BARC (Chairman) Kailas, S. BARC, (Co Chairman) Chakravarty, D.P. BARC Chandrachoodan, P.P. BRNS Desai, Tushar Mumbai Univ. Dhamija, Lokesh BOC Edwards Dixit, Anand New Poona Ind. Gadkari, S.C. BARC Gantayet, L.M BARC Gupta, A.C. NPL Gupta, S.K. BARC (Co Convener) Handu, V.K. BARC Jathar, Rajendra Varian Joshi, S.N. CEERI Korgaonkar, A.V. IVS Kotaiah, S. CAT Kumar, Vijay BARC Matkar, A.W. BARC Mittal, K.C. BARC (Convener) Nema, P.K. BRNS Pandit, V.S. VEC Puranik, S.G. Ashwani Enterprises Puri, R.R. BARC Ranga Rao, Y. Vac. Techniques Sabharwal, Rajat Alcatel Sakhamuri, Prashant HHV Bangalore Sanyal, T. NFC Sarkar, S.K. TIFR Sarma, K.R. Atomic Vacuum Saxena, Y.C. IPR Sharma, B.P. BARC Shukla, S.K. RRCAT Singh, R.P. BARC Suri, A.K. BARC Suthar ,R.L. BARC Venugopa,l V. BARC Vyavahare, Mohan Ultimate Technologies Yakhmi, J.V. BARC

A study of uncertainties at calibration of vacuum gauges

A A Lisenkov1 and D K Kostrin21 Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, 199178, Saint Petersburg, Russia2 Saint Petersburg Electrotechnical University “LETI”, 197376, Saint Petersburg, RussiaE-mail: lisran@yandex.ru, dkkostrin@mail.ru. In this preface the main results of the 24th International Conference on Vacuum Technique and Technology (VTT2017) that was held on 6–8 June 2017 in Saint Petersburg, Russia are discussed.In the period from 6 to 8 June 2017 at the Saint-Petersburg Electrotechnical University “LETI” and All-Russian Research Institute of Metrology took place the 24th International Conference on Vacuum Technique and Technology. The Organizers of the Conference were: Russian Academy of Sciences, Institute of Problems of Mechanical Engineering RAS, Saint Petersburg Electrotechnical University “LETI”, Saint Petersburg Polytechnic University, All-Russian Research Institute of Metrology and Russian Scientific and Technical Vacuum Society.The aim of the Conference was to study the results of the research in physics of vacuum, vacuum measuring, mass spectrometry and leak detection. Were discussed the issues of producing vacuum, vacuum equipment and development of the new technological processes. Special attention was paid to the use of vacuum technology in the processes of films and coatings formation using plasma and related methods, study of the properties of coatings and methods of their research, new composite coatings, including nanomaterials, as well as new areas of their use, and the development of modern equipment and processes. Were analyzed the problems of industry cooperation and collaboration in the framework of the Federal Target Programs and the formation of the General Strategy of the development of vacuum equipment and technologies as an independent high-tech industries.In this regard, the main sections of the Conference were:1. Vacuum technique. Vacuum measurement. Mass spectrometry.2. Vacuum ion-plasma methods of surface treatment.3. Nanomaterials and nanotechnologies.4. Physical processes of coating formation, properties and methods of their evaluation.In the course of work of the Conference were presented 87 oral reports, including 13 plenary, and 21 posters. Among the speakers were professors, PhD students, students and representatives of industry. The Conference was attended by representatives of different regions of Russia and Republic of Belarus, Kazakhstan, Ukraine and Vietnam. The total number of participants was 115.All of the presented scientific results and developments correspond to the level of World analogues, and in some cases surpass them in the performance and technological capabilities. Most of the developments are protected by patents for inventions; some of them were also presented at the XII International Exhibition of Vacuum Equipment “VacuumTechExpo 2017” (Moscow, 11–13 April 2017).All messages of the Conference participants draw the scientific and practical interest. In general discussions questions, comments and opinions were presented. It should be noted the high professionalism of the speakers and the high ethics of communication parties during the exchange of the opinions and answers to the questions.During the Conference were held “round tables” devoted to the analysis of the reports and the work of the Conference, also they touched upon the issues of training of the students and postgraduates. It was noted that currently young people pay more attention to the technical education and after graduation find jobs at the enterprises of electronic industry.In order to summarize the Conference results participants noted that the diversity and number of the submitted reports are the signs of the constant technical development of this field of science and technology. However, against this background, participants, technical specialists with deep theoretical knowledge and extensive practical experience, expressed concern about the absence of a strategic plan for the development of vacuum technology in the Country in the near future.The Conference participants decided to:1. Consider the work of the Conference as successful.2. State that the Conference is an effective link between the industrial enterprises, educational and academic institutions located in different regions of Russia and abroad.3. Keep the format of this Conference and held the next one in June 2018.4. Draw the attention of the Russian Scientific and Technical Vacuum Society and its President on the need for consolidation of specialists of this direction, their organizations and, subject to the comments made, further promoting the achievements and relevance of tasks associated with the development of vacuum technology.Photographs are available in the PDF

Vacuum measurements and gauge calibration

Calibration of ultrahigh vacuum gauge from 10 −9 Pa to 10 −5 Pa by the two-stage flow-dividing system

The quadrupole and its applications in vacuum technology and mass spectrometry

1652. Conference on the calibration of vacuum gauges and related problems.: W Steckelmacher, Vacuum, 16 (8), Aug 1967, 433–437.

The calibration of vacuum gauges