• Home
  • Search
  • A MEMS Transducer for Ultrasonic Flaw Detection
  • Cite Icon4
  • https://doi.org/10.22260/isarc2002/0059Copy DOI Icon

A MEMS Transducer for Ultrasonic Flaw Detection

Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

A MEMS Transducer for Ultrasonic Flaw Detection A. Jain, D. Greve, J. Oppenheim Pages 375-381 (2002 Proceedings of the 19th ISARC, Washington, USA, ISSN 2413-5844) Abstract: Metal structures can fail because of fatigue crack propagation or because of section loss from corrosion. Regular inspection is required to intercept such failures, and in situ sensors would be a superior technology for that purpose. We have designed and fabricated arrays of MEMS capacitive diaphragm transducers and we report on their performance as pulse-echo detectors in direct contact with solids. Our chip is approximately 1-cm square and features nine detectors in a linear array, each detector containing 180 hexagonal diaphragms. Performance of the detector array was studied by bonding the chip to test specimens and applying an ultrasonic pulse using a commercial ultrasonic transducer. One experiment recreates an on-axis excitation in which the pulse arrives uniformly at all detectors, and another experiment recreates an off-axis excitation in which the pulse arrival is delayed from one detector to the next along the length of the array, permitting accurate localization of the source using phased array signal processing. The results establish that MEMS transducers can function successfully as phased array detectors of ultrasonic signals in solids. Keywords: Diaphragm; flaw detection; MEMS; phased array; ultrasonics DOI: https://doi.org/10.22260/ISARC2002/0059 Download fulltext Download BibTex Download Endnote (RIS) TeX Import to Mendeley

Similar Papers
  • Book Chapter
  • Citations4

Rail Defect Detection Method Based on BP Neural Network

  • Oct 06, 2020
  • Qinhua Xu +3
  • Conference Article
  • Citations1

Orthogonal signal decomposition coupled with Bayes and fuzzy discriminant classifiers for ultrasonic flaw detection

  • Oct 05, 1997
  • H.C Sun +1
  • Research Article
  • Citations1

Ultrasonic flaw detection in cast iron by boxcar integration

  • Jun 01, 1980
  • NDT International
  • K Neelakantan +2
  • PDF
  • Research Article

Comparative Analysis of Ultrasonic Phased Array Detection and CIVA Simulation

  • Aug 01, 2023
  • Journal of Physics: Conference Series
  • Zuyue Wang +1
  • Research Article

Ultrasonic Attenuation in Hot Specimens by the Momentary Contact Method with Pressure Coupling

  • Jul 01, 1971
  • The Journal of the Acoustical Society of America
  • Emmanuel Papadakis
  • Conference Article

Reconstructing ultrasonic images and flaw detection in time-frequency domain by matching a-scan inspections

  • Sep 08, 2005
  • INFM-OAR (INFN Catania)
  • Addisson Salazar +2
  • Research Article
  • Citations18

Ultrasonic flaw detection of discontinuous defects in magnesium alloy materials

  • Jul 01, 2019
  • China Foundry
  • Sheng-Nan Xue +5
  • Conference Article
  • Citations6

Image de-noising via spectral distribution similarity analysis for ultrasonic non-destructive evaluation

  • Jan 01, 2014
  • AIP conference proceedings
  • B Xiao +4
  • Conference Article
  • Citations3

Adaptive filtering and Fractional Fourier transform for ultrasonic signal processsing and flaw detection

  • Sep 01, 2014
  • Yufeng Lu +1
  • Research Article
  • Citations9

Porous Piezoelectric Ceramics: Materials for Ultrasonic Flaw Detection and Medical Diagnostics

  • Apr 01, 2002
  • Inorganic Materials
  • P V Ivanov +3
  • Research Article

The use of Synchronous Detection in Ultrasonic Flaw Detection of Large -Sized Products with Large Integral Attenuation of Signals

  • Nov 15, 2016
  • Indian Journal of Science and Technology
  • Vladimir K Kachanov +4
  • Research Article

Discussion: “Ultrasonic Flaw Detection in Pipes by Means of Shear Waves” (Moriarty, C. D., 1951, Trans. ASME, 73, pp. 225–229)

  • Apr 01, 1951
  • Journal of Fluids Engineering
  • A W Rankin
  • Research Article

Investigation of Fire damaged Wind turbine Tower for Structural Integrity

  • Jun 01, 2025
  • e-Journal of Nondestructive Testing
  • Chetan A Somani +1
  • Research Article

The Processing Algorithm for Wideband Signals Propagating in Media with Frequency Dispersion

  • Jan 01, 2020
  • Infocommunications journal
  • Andrei A Kalshchikov +2
  • Research Article
  • Citations4

High speed and high precision demodulation method of fiber grating based on dispersion effect

  • Jan 01, 2017
  • Acta Physica Sinica
  • Li Zheng-Ying +6
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.