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  • https://doi.org/10.1016/j.tsf.2008.11.071Copy DOI Icon

Accelerated resistive humidity sensing properties of silicon nanoporous pillar array

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Abstract

Accelerated resistive humidity sensing properties of silicon nanoporous pillar array

Similar Papers
  • Research Article
  • Citations5

Effect of electrode configuration on capacitive humidity sensitivity of silicon nanoporous pillar array

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