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- https://doi.org/10.1016/s1474-6670(17)31113-8
Actuators for RF MEMS Devices
- Sep 1, 2004
- IFAC Proceedings Volumes
- R.r Mansour +4 more
Abstract
Actuators for RF MEMS Devices
- # Variable Capacitor
- # MEMS Variable Capacitors
- # RF MEMS Devices
- # Satellite Communication Systems
- # RF MEMS
- # Tunable RF MEMS
- # Actuators For Devices
- # Tunable MEMS
- # Devices In Wireless
- # Tunable RF