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  • https://doi.org/10.1364/ao.25.003152Copy DOI Icon

Analysis of measurement accuracy in sinusoidal phase modulating interferometry

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Abstract

A theoretical analysis of the measurement accuracy in sinusoidal phase modulating (SPM) interferometry is presented. The measurement accuracy is dependent on multiplicative and additive noise. The characteristics of SPM interferometry in the presence of this noise are made clear. Theoretical results show clearly that SPM interferometry has a high measurement accuracy of the order of 1 nm.

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