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Binary Nonnegative Matrix Factorization Applied to Semi-conductor Wafer Test Sets

  • Jan 1, 2009
  • Reinhard Schachtner +2 more
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Abstract

We introduce a probabilistic extension of non-negative matrix factorization (NMF) by considering binary coded images as a probabilistic superposition of underlying continuous-valued elementary patterns. We provide an appropriate algorithm to solve the related optimization problem with non-negativity constraints which represents an extension of the well-known NMF-algorithm to binary-valued data sets. We demonstrate the performance of our method by applying it to the detection and characterization of hidden causes for failures during semi-conductor wafer processing. We decompose binary coded (pass/fail) wafer test data into underlying elementary failure patterns and study their influence on the performance of single wafers during testing.KeywordsNonnegative Matrix FactorizationNonnegative Matrix FactorizationGradient AscentSource PatternNonnegative Matrix Factorization AlgorithmThese keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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