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  • https://doi.org/10.1109/apmc.1999.833730Copy DOI Icon

Characterization of coplanar waveguides on MCM-D silicon substrate

  • Nov 30, 1999
  • L Liu +3 more
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Abstract

This paper presents the characteristics of coplanar waveguides (CPW) on silicon substrates fabricated through the MCM-D process. The propagation constant and characteristic impedance are measured at frequencies from 0.05 GHz to 10.05 GHz, using a vector analyzer, and with LRRM on-wafer calibration techniques followed with a de-embedding procedure. Two quasi-TEM models are developed to account for the EM affects in the CPW structure: the distributed equivalent elements RLGC were modeled by both closed-form approximation and fully lumped-equivalent circuits. The calculated characteristics show good agreement with the measured ones. The proposed models should be useful for the analysis and design of RFIC on silicon.

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