Commissioning an EUV mask microscope for lithography generations reaching 8 nm

Aerial images for isolated defects and the interactions of defects with features are compared between the Actinic Inspection Tool (AIT) at Lawrence Berkeley National Laboratory (LBNL) and the fast EUV simulation program RADICAL. Comparisons between AIT images from August 2007 and RADICAL simulations are used to extract aberrations. At this time astigmatism was the dominant aberration with a value of 0.55 waves RMS. Significant improvements in the imaging performance of the AIT were made between August 2007 and December 2008. A good match will be shown between the most recent AIT images and RADICAL simulations without aberrations. These comparisons will demonstrate that a large defect, in this case 7nm tall on the surface, is still printable even if it is centered under the absorber line. These comparisons also suggest that the minimum defect size is between 1.5nm and 0.8nm surface height because a 1.5nm defect was printable but a 0.8nm was not. Finally, the image of a buried defect near an absorber line through focus will demonstrate an inversion in the effect of the defect from a protrusion of the dark line into the space to a protrusion of the space into the line.

As commercialization of extreme ultraviolet lithography (EUVL) progresses, direct industry activities are being focused on near term concerns. The question of long term extendibility of EUVL, however, remains crucial given the magnitude of the investments yet required to make EUVL a reality. Extendibility questions are best addressed using advanced research tools such as the SEMATECH Berkeley microfield exposure tool (MET) and actinic inspection tool (AIT). Utilizing Lawrence Berkeley National Laboratory's Advanced Light Source facility as the light source, these tools benefit from the unique properties of synchrotron light enabling research at nodes generations ahead of what is possible with commercial tools. The MET for example uses extremely bright undulator radiation to enable a lossless fully programmable coherence illuminator. Using such a system, resolution enhancing illuminations achieving k1 factors of 0.25 can readily be attained. Given the MET numerical aperture of 0.3, this translates to an ultimate resolution capability of 12 nm. Using such methods, the SEMATECH Berkeley MET has demonstrated resolution in resist to 16-nm half pitch and below in an imageable spin-on hard mask. At a half pitch of 16 nm, this material achieves a line-edge roughness of 2 nm with a correlation length of 6 nm. These new results demonstrate that the observed stall in ultimate resolution progress in chemically amplified resists is a materials issue rather than a tool limitation. With a resolution limit of 20-22 nm, the CAR champion from 2008 remains as the highest performing CAR tested to date. To enable continued advanced learning in EUV resists, SEMATECH has initiated a plan to implement a 0.5 NA microfield tool at the Advanced Light Source synchrotron facility. This tool will be capable of printing down to 8-nm half pitch.

Objectives: Due to the distributed network topology of peer-to-peer network, there are high possibilities for the malicious node, thereby making security a very important criterion in managing the network performance. Methods: Security in the network is ensured by validation using Rumor Recovery (RR) protocol. Trust table verification method guarentees the validity of initiator node and sower node validity. In this method, the initiator node sends its query message to the responder node according to the rumor generation and recovery phase and query issuance phase of the RR protocol. Responder node validation process is used for saving responding nodes from attacks. Findings: In this paper, we mainly concentrate on the detection and elimination of initiator node attack, replay attack, and sower attack. The performance metrics considered for evalution are delay, delivery ratio and throughput. Simulation results show that the proposed Trusted Rumor Riding (TRR) protocol. 1. Out performs RR protocol by 34% in terms of delay, 1% in terms of delivery ratio and 17% in terms of throughput while detecting and eliminating the initiator attack; 2. Out performs RR by 98% in terms of delay, 41% in terms of delivery ratio and 19% in terms of throughput while detecting and eliminating the replay attack; and 3. Out performs RR by 95% in terms of delay, 9% in terms of delivery ratio and 36% in terms of throughput while detecting and eliminating the sower attack. Most of the existing works did not consider these three attacks; only few works considered it, but those were failed to meet the quality of service requirements. The detected attacks are avoided in a effective manner to provide the secure communication. Applications/Improvement: From the results, it is concluded that the proposed TRR protocol can detect several attack while satisfying the quality of service needs.

This report finds that energy efficiency programs for customers of publicly owned utilities saved electricity at an average cost of 2.4 cents per kilowatt-hour (kWh) from 2012 to 2017. Utilities use such cost performance metrics to assess effectiveness of efficiency program portfolios, determine what programs to offer customers, and, more broadly, ensure electricity system reliability at the most affordable cost as part of electric utility resource adequacy planning and resource procurement processes. The study analyzed efficiency program data reported by 111 program administrators for 219 publicly owned utilities in 14 states — about 90 percent of the municipal utilities and public utility districts that report the data to the Energy Information Administration (EIA). The data represent 88 percent of all spending and 75 percent of all savings that publicly owned utilities reported to EIA in those years. Berkeley Lab used data from several sources, including data provided directly by American Public Power Association members, publicly available annual reports and regional data collections.

Several active queue management (AQM) schemes have been proposed to address the bufferbloat issue, a long network delay and performance degradation issue caused by excess buffering of packets in network nodes. The solutions proposed up to now, however, satisfy only a subset of the key network performance metrics, i.e., end-to-end throughput, throughput fairness, and delay, in 802.11s-based multi-radio multi-channel wireless mesh networks (MRMC WMN). In this letter, we propose FD-AQM, a fairness-aware delay-controlled AQM to satisfy all three key network performance metrics simultaneously in the 802.11s-based MRMC WMN. The proposed FD-AQM achieves the goal by adopting a per-queue drop interval which is recalibrated according to the average round-trip time of flows, and a drop decision mechanism which considers average throughput as well as target delay. Through simulations, we show that FD-AQM is superior to other AQM schemes in terms of throughput and fairness.

Enhancement of wireless sensor network lifetime by deploying heterogeneous nodes

<p>Environmental monitoring often requires the observation of phenomena at different spatial and temporal scales. For example, to study the anthropic impact on natural ecosystems, it is necessary both to evaluate its effects on a large scale and to detect and recognize the environmental criticalities that, locally, determine these effects. These needs impose tight requirements on data temporal, spatial and spectral resolution that a single aerospace platform can hardly satisfy. Therefore, it is necessary to develop new collaborative paradigms between different platforms to improve their observation capabilities, exploiting interoperability between heterogeneous platforms and sensors. However, even multi-platform approaches, due to the limitations of the individual platforms currently available in terms of revisit time and sensor spatial resolution, cannot fully comply with the requirements imposed by some specific environmental issues at acceptable costs.</p><p>In this paper, HAPS (High Altitude Pseudo-Satellite) use is proposed as a tool to overcome these limitations and to extend the applicability of the multi-platform paradigm. </p><p>In environmental monitoring context, one of the main advantages offered by HAPSs consists in the possibility of providing data with higher spatial resolution than satellites, and at lower cost compared to aerial platforms. Moreover, HAPSs offer a larger field of view than UAVs and can provide data types such as fluorescence or hyperspectral ones that, because of sensor weight and cost, rarely could be acquired by UAVs. Finally, HAPS platforms, thanks to their station-keeping capability on a desired area, offer the possibility of having data with a high temporal resolution to monitor the temporal evolution of phenomena at a rate currently not possible with other platforms.</p><p>Different HAPS configurations have been proposed, based on aerostatic or aerodynamic forces. CIRA is designing a HAPS that, thanks to its hybrid configuration, is able to generate aerodynamic and aerostatic forces. It could fly at an altitude of 18-20 km, from this altitude range, the field of view has a diameter length of about 600 km. Maintenance and updating of its equipment and payload is also possible because the platform can land and take-off again.</p><p>CIRA is also designing the platform payload. The design goal is to define a new wide-area sensor based on visible, thermal, or hyperspectral cameras, with a better resolution than satellites. In this way, it will be possible to detect environmental anomalies in persistence in order to alert the other platforms. A very high focal second-reading sensor will also be used to avoid false-positive alerts.         </p><p>In this paper, we will present the main characteristics of HAPS platforms and how they, in synergy with other ones, would lead to considerable advantages in environmental monitoring. In particular, we will discuss the multi-platform paradigm, the current platform limits and their influence on the paradigm effectiveness in the context of environmental monitoring, characteristics of the HAPS platform that CIRA is currently conceptually designing in the context of the OT4clima Project and the main issues relative to its payload design.</p>

The XM-1 x-ray microscope is located at the Advanced Lights Source at Lawrence Berkeley National Laboratory. It is a full-field transmission x-ray microscope utilizing zone plates for both the condenser and objective lenses. It was designed to be a high-throughput tool for high-resolution x-ray microscopy. It continues to be a valuable scientific tool with a user-friendly design, and in recent years has been modified to probe a wider range of scientific samples. It has a spatial resolution of 25 nanometers using high-precision optics fabricated with electron beam lithography. It has been used for magnetic imaging with contrast due to x-ray magnetic circular dichroism. This enables high-resolution, element-specific imaging of magnetic domains, even in applied magnetic fields. It has been used for cryo-tomography of biological samples with freezing and preservation of samples by helium gas. It has been used to study cement formation with high resolution imaging of the hydrated reaction. It has been used for studies of interconnects by exploiting the recently increased energy range that allows imaging at up to I .8 keV for transmission through silicon.

A synchrotron radiation based x-ray microprobe analytical technique, x-ray beam induced current (XBIC), is suggested and demonstrated at the Advanced Light Source at the Lawrence Berkeley National Laboratory. The principle of XBIC is similar to that of electron/laser beam induced current with the difference that minority carriers are generated by a focused x-ray beam. XBIC can be combined with any other x-ray microprobe tool, such as the x-ray fluorescence microprobe (μ-XRF), to complement chemical information with data on the recombination activity of impurities and defects. Since the XBIC signal, which carries information about the recombination activity of defects in the sample, and the μ-XRF signal, which contains data on their chemical nature, can be collected simultaneously, this combination offers a unique analytical capability of in situ analysis of the recombination activity of defects and their chemical origin with a high sensitivity and a micron-scale spatial resolution. Examples of an application of this technique to multicrystalline silicon for solar cells are demonstrated.

Camera design involves tradeoffs between spatial and temporal resolution. For instance, traditional cameras provide either high spatial resolution (e.g., DSLRs) or high frame rate, but not both. Our approach exploits the optical stabilization hardware already present in commercial cameras and increasingly available in smartphones. Whereas single image super-resolution (SR) methods can produce convincing-looking images and have recently been shown to improve the performance of certain vision tasks, they are still limited in their ability to fully recover information lost due to under-sampling. In this paper, we present a new imaging technique that efficiently trades temporal resolution for spatial resolution in excess of the sensor's pixel count without attenuating light or adding additional hardware. On the hardware front, we demonstrate that the consumer-grade optical stabilization hardware provides enough precision in its static position to enable physically-correct SR. On the algorithm front, we elaborately design the Image Stabilization (IS) lens position pattern so that the SR can be efficiently conducted via image deconvolution. Compared with state-of-the-art solutions, our approach significantly reduces the computation complexity of the processing step while still providing the same level of optical fidelity, especially on quantifiable performance metrics from optical character recognition (OCR) and barcode decoding.

BD-SIIT and DSTM are widely deployed IPv4/IPv6 Transition mechanism to improve the performance of the computer network in terms of Throughput, End to End Delay(EED) and Packet Drop Rate(PDR).In this journal paper we have Implemented and Compared the Performance Issues of our newly proposed Dollops Wise Curtail(DW&C)IPv4/IPv6 Migration Mechanism with BD-SIIT and DSTM in NS2. Implementation and Comparison Performance Analysis between Dollops Wise Curtail, BD-SIIT and DSTM shows that Dollops Wise Curtail IPv4/IPv6 migration algorithm performance outperforms than BD-SIIT and DSTM. Based on extensive simulations, we show that DW&C algorithm reduces the Packet Drop Rate(PDR),End to End Delay(EED) and achieves better Throughput than BD-SIIT and DSTM. In our research work observation, the performance metrics such as Throughput, EED and PLR for DW&C,BD-SIIT and DSTM are measured using TCP,UDP,FTP and CBR Traffics.

Geographic routing is recognized as an appealing approach to achieve efficient communications with low computational complexity and space cost. In order to apply this technology in Cyber-Physical Systems (CPSs), a comprehensive consideration must be given to performance issues such as throughput, delay, and load balance. In this paper, we provide a new routing scheme based on forwarding packets to multiple geographic directions. The proposed routing protocols are studied and analyzed theoretically. Theoretical bounds of throughput, delays and space cost are presented. Simulations show that our method performs more efficiently than traditional geographic routing schemes in terms of throughput, delay, and load balance with acceptable space cost. Our experiments also verify the tradeoff between performance metrics.

A practical cross layer cooperative MAC framework for WSNs

Transmission opportunity (TXOP) is a new scheme specified in the IEEE 802.11e standard which enables a station to transmit multiple frames consecutively within a burst after it gains the channel. Realistic traffic loads in wireless local area networks (WLANs) with multimedia applications often exhibit the bursty and self-similar properties which imply the frequent occurrence of the large bursts of frame arrivals and thus require the TXOP scheme to be dynamically adapted to the traffic characteristics. This paper presents a dynamic TXOP scheme which adjusts the TXOP limits of mobile stations according to the current status of their transmission queues. We further develop an analytical model to evaluate the performance of this scheme under self-similar traffic. QoS performance metrics in terms of throughput, end-to-end delay, and frame loss probability are derived and validated via NS2 simulation experiments. The numerical results reveal that the dynamic TXOP scheme achieves the better QoS than the original one under self-similar traffic.

This research wants to compare the performance of Stream Control Transportation Protocol (SCTP) with two difference mechanism, which are Ad-hoc on Demand Distance Vector (AODV) and Dynamic Source Routing protocol (DSR) by using Network Simulator (NS-2). Specifically, it measures the behavior of SCTP in terms of throughput and smoothness by having assumption that routing protocol in MANET (Mobile Ad-hoc Network) can bring significant effect in SCTP in the overall performance. Actually, IETF (Internet Engineering Task Force), has issued a new protocol called SCTP, which in this study, the interaction of SCTP is investigated through the examination of traffic flows through a number of network topologies. This performance analysis is over MANET Routing Protocol that enables the process of analysis of several performance metrics. The simulation use topology with 16 nodes that is consisting of metric 4×4 of SCTP transport layer for both routing protocol of AODV and DSR. At last, this research have been found that MANET impact less on the throughput of SCTP with only amounted to 0-2% within 5m/s to 25 m/s of simulation area. Furthermore, the speed of node movement does not significantly affect the smoothness as well.