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  • https://doi.org/10.1109/icmts48187.2020.9107905Copy DOI Icon

Comparison of cut-back method and optical backscatter reflectometry for wafer level waveguide characterization

  • May 1, 2020
  • Anna Peczek +3 more
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Abstract

The optimum optical characterization method suitable for wafer level waveguide testing is an important issue for silicon photonic methodology. In this paper we focus on comparing the two most widespread measurement techniques: cut-back and optical backscatter reflectometry.

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