• Home
  • Search
  • Comparison Of Optical Scatterometer And Profilometer Techniques For Characterizing Smooth Surfaces
  • Cite Icon3
  • https://doi.org/10.1117/12.949158Copy DOI Icon

Comparison Of Optical Scatterometer And Profilometer Techniques For Characterizing Smooth Surfaces

  • Abstract
  • Literature Map
  • Citations
  • Similar Papers
Abstract

Several techniques are available for characterizing the surface microstructure of smooth components. Often it is necessary to compare the results from two or more of these techniques. This can lead to problems unless it is understood that all measurement techniques are bandwidth limited, and each technique has a characteristic transfer function. We will discuss several techniques in this regard, including the optical profilometer (WYKO), the optical scatterometer (both angle-resolved and TIS), and the mechanical profilometer (Talystep). A number of samples having different microstructure properties were characterized using these techniques, and results will be discussed.

Similar Papers
  • Research Article
  • Citations20

Multivariable Nyquist self-tuning: a general approach

  • Jan 01, 1989
  • IEE Proceedings D Control Theory and Applications
  • B Kouvaritakis +1
  • Research Article
  • Citations13

Small‐signal analysis of interleaved dual boost converter

  • Oct 15, 2001
  • International Journal of Circuit Theory and Applications
  • Mummadi Veerachary +2
  • Research Article
  • Citations30

Fourier microfluidics

  • Jan 01, 2008
  • Lab on a Chip
  • Y Xie +3
  • PDF
  • Research Article
  • Citations21

Passive modelling of the electrodynamic loudspeaker: from the Thiele–Small model to nonlinear port-Hamiltonian systems

  • Jan 01, 2020
  • Acta Acustica
  • Antoine Falaize +1
  • Research Article

Vibration filter using vector channel periodic lattice

  • Dec 01, 2006
  • Journal of Mechanical Science and Technology
  • Won-Gul Hwang +1
  • Conference Article
  • Citations1

Microstructure of metal coatings deposited using ion-beam processes

  • Mar 04, 1993
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Nasrat A Raouf +2
  • Research Article
  • Citations198

Performance of a 41X41-cm2 amorphous silicon flat panel x-ray detector for radiographic imaging applications.

  • Jun 01, 2000
  • Medical Physics
  • Paul R Granfors +1
  • Research Article

Evaluation of Kynurenine Behaviour on the Glassy Carbon Electrode Modified By Nafion Layer

  • May 01, 2020
  • Electrochemical Society Meeting Abstracts
  • Robert Mroczka +2
  • Research Article
  • Citations1

Influence of Tool Offset Distance on Microstructure and Mechanical Properties of the Dissimilar AA2024–AA7075 Plates Joined by Friction Stir Welding

  • Dec 01, 2020
  • SHILAP Revista de lepidopterología
  • Hossain Soleimany +2
  • Research Article
  • Citations2

Achievement of learning volleyballs: Correlation between mental hygiene and the level of physical fitness

  • Dec 07, 2021
  • Journal Sport Area
  • Rola Angga Lardika +3
  • Conference Article
  • Citations1

Surrogate Modeling-Based Acceleration of Multi-Harmonic Near-Field Measurements

  • Jan 18, 2021
  • Jonas Urbonas +3
  • Conference Article

Comparison of Optical Scatterometer and Optical Profilometer Techniques for Microstructure Characterization of Optical Surfaces

  • Jan 01, 1988
  • Optical Interference Coatings
  • R.D Jacobson +3
  • Research Article
  • Citations23

Impact of Degree of Graphitization, Surface Properties and Particle Size Distribution on Electrochemical Performance of Carbon Anodes for Potassium‐Ion Batteries

  • Mar 09, 2022
  • Batteries & Supercaps
  • Jens M Wrogemann +6
  • Research Article
  • Citations13

The effects of the CNF ratio on the microstructure, corrosion, and mechanical properties of CNF-reinforced diamond cutting tool

  • Aug 27, 2021
  • Diamond and Related Materials
  • Serkan Islak +5
  • Book Chapter

DUAL MODEL MATCHING

  • Jan 01, 1992
  • Design Methods of Control Systems
  • R Tagawa
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.