• Home
  • Search
  • Designing DWDM multiplexers on SiON wafers
  • https://doi.org/10.1117/12.882195Copy DOI Icon

Designing DWDM multiplexers on SiON wafers

  • Abstract
  • Literature Map
  • References
  • Similar Papers
Abstract

I propose an integrated multiplexer/demultiplexer that use a concave blazed diffraction grating on SiON wafer. The paper presents a technology that overcome existing issues regarding implementation of such a microoptic device. Two types of similar integrated systems were developed but both of them have not minimized chromatic, astigmatism and spherical aberrations. Both systems use gold coating for vertical walls of diffraction grating that has reflection index lower than aluminum for wavelength used. Technology proposed in this paper minimizes the chromatic, astigmatism and spherical aberrations. Also is used aluminum for coating of vertical walls of diffraction grating. SiON wafer is etched with Argon plasma through photoresist mask with thickness of 0,8 μm for grating configuration allowing reusing of the photoresist in next stage of coating. This makes possible that coating through liftoff to be aligned to vertical walls of concave diffraction grating, eliminating positioning errors due to coating mask.

Similar Papers
  • Conference Article

Effect of different hybrid intraocular lenses (IOLs) on the optical property of polychromatic vision

  • Jan 01, 2023
  • AIP conference proceedings
  • Israa A Ahmed +1
  • Research Article
  • Citations90

Impact of chromatic and spherical aberration on the focusing of ultrashort light pulses by lenses

  • Jan 15, 1993
  • Optics Letters
  • M Kempe +1
  • Research Article
  • Citations53

Optics and Photonics: An Introduction

  • Dec 18, 2000
  • American Journal of Physics
  • F Graham Smith +2
  • PDF
  • Research Article

The Effect of adding First Order Aberrations To Third Order Aberrations on Point Spread Function for Triangular Aperture

  • Jun 10, 2020
  • Journal of Kufa-Physics
  • Widad Hamza Tarkhan
  • Conference Article
  • Citations1

Design of dual-FOV refractive/diffractive LWIR optical system

  • Dec 03, 2007
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Jian-Ping Zhang +2
  • Research Article
  • Citations23

The effect of spherical and other aberrations upon the modulation transfer of the defocussed human eye

  • Nov 01, 1998
  • Ophthalmic and Physiological Optics
  • N M Jansonius +1
  • Research Article
  • Citations114

Information Transfer in a TEM Corrected for Spherical and Chromatic Aberration

  • Jul 02, 2010
  • Microscopy and Microanalysis
  • M Haider +4
  • Research Article
  • Citations40

Measuring and correcting aberrations of a cathode objective lens

  • Dec 10, 2010
  • Ultramicroscopy
  • R.M Tromp
  • Conference Article

Glasses election to provide aplanatic cemented doublets

  • Apr 15, 1993
  • Maria Jesus Toledo
  • Conference Article
  • Citations7

<title>Immersion lenses for low-voltage SEM and LEEM</title>

  • Sep 25, 1995
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Katsushige Tsuno +2
  • Research Article

Chromatic and spherical aberration correction with hexapole and quadrupole fields.

  • Apr 01, 2026
  • Ultramicroscopy
  • Shigeyuki Morishita +6
  • Conference Article

The design of a switchable dual-field-of-view thermal optical system

  • Sep 11, 2013
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Ting-Cheng Zhang +1
  • Research Article
  • Citations16

Optical Quality Comparison between Spherical and Aspheric Toric Intraocular Lenses

  • Sep 01, 2014
  • European Journal of Ophthalmology
  • Cari Pérez-Vives +4
  • Research Article
  • Citations8

Visual performance and aberration associated with contact lens wear in patients with keratoconus: a pilot study

  • Aug 01, 2014
  • Clinical Optometry
  • Bariah Mohd-Ali +2
  • Research Article
  • Citations13

Reduction of spherical and chromatic aberration in axial-scanning optical systems with tunable lenses.

  • May 19, 2021
  • Biomedical Optics Express
  • James A Strother
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.