8- https://doi.org/10.1109/omems.2002.1031424
Development of a low-cost 8×8 optical switch using micro hot embossing
- Nov 7, 2002
- X.c Shan +1 more
Abstract
An 8/spl times/8 optical switch with a potentially low cost has been designed and fabricated. The switch device, driven by electrostatic force, was made of polymer material using hot embossing process. The optical switch was aligned and assembled together with input and output fibers via grooves etched on a silicon substrate.
- # Hot Embossing Process
- # Optical Switch
- # Output Fibers
- # Switch Device
- # Electrostatic Force
- # Silicon Substrate
- # Input Fibers
- # Hot Process
- # Embossing Process
- # Hot Embossing
