- Research Article
19
- 10.1016/j.nimb.2013.05.065
Development of ionic liquid ion source with porous emitter for surface modification
- Jul 09, 2013
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Mitsuaki Takeuchi + 3 more +3
Development of ionic liquid ion source with porous emitter for surface modification