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Dynamic behavior of internal elements of high-frequency integrated circuits studied by time-resolved optical-beam-induced current (OBIC) method

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Abstract

A novel method for the optical testing of integrated circuits with ultrafast timeresolution and microscopic spatial resolution is described. The method is capable of detecting internal logical states switching speeds and propagation delays within complex integrated circuits as well as running times within single elements. In the experi ment a laser scanning microscope was combined with a cw modelocked argonion laser and an OBIC-stage. We achieved the complete mapping of the optical beam induced current signals in IC''s with a time resolu tion of about 100 picoseconds and a spatial resolution of less than

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