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Enhanced optical resolution with photo-induced diffraction: Non-linear effects

  • Jan 1, 1999
  • T Velinov +2 more
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Abstract

A pump-probe variant of the photothermal microscope is used to enhance the resolution of the scanning optical microscope. The improved optical resolution is demonstrated on etched structures in Si. Special attention is paid to non-linear effects that can both improve and degrade the resolution. It is shown that the deterioration of the resolution in Si is due to saturation of the photoreflectance signal.

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