• Home
  • Search
  • Fabricated technology for polymer/Si arrayed waveguide grating
  • Cite Icon1
  • https://doi.org/10.1117/12.480994Copy DOI Icon

Fabricated technology for polymer/Si arrayed waveguide grating

  • Abstract
  • Literature Map
  • Citations
  • Similar Papers
Abstract

In this paper, the basic principle, details of fabricating process and measuring results were described for a polymer/Si arrayed waveguide grating (AWG) multiplexer around the central wavelength of 1.550 micron with the wavelength spacing of 1.6nm. The fluorinated polymer was used to fabricate AWG to reduce the optical loss, but the fluorinated material was expensive, so we initially adopted the polymer of polymethylmethacrylate(PMMA) type to go on technologic research. The regulated curve of refractive index was given for the core polymer. In order to obtain better shape of the waveguide after the reactive ion etching (RIE) using oxygen, an aluminum film as mask was used on polymer instead of conventional photoresist as mask. In order to reduce radiation loss of underciadding layer to Si substrate, the underciadding layer thickness was increased to 11 micron through two times of spin-coating, thus the radiation loss was reduced to the order of 0.001dB. The measuring results indicates fabricated optical waveguide achieved single-mode transmission.

Similar Papers
  • Conference Article

Fabrication of 32×32 polymer arrayed waveguide gratings using remelting technique

  • Jan 31, 2006
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Daming Zhang +4
  • Conference Article

Electro-Optically Tunable Folded Arrayed Waveguide Grating Multiplexer

  • Jan 01, 2004
  • Kevin Le +3
  • Conference Article
  • Citations2

Phase error distribution and spectral response in silica-based AWG multiplexers

  • Oct 27, 1999
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Axel Klekamp +2
  • Research Article
  • Citations11

Research and fabrication of a UV curable polymeric 41 × 41 array‐waveguide grating multiplexer

  • Sep 19, 2007
  • Microwave and Optical Technology Letters
  • C M Chen +8
  • Research Article
  • Citations6

Multistage WDM access architecture employing cascaded AWGs

  • Oct 11, 2008
  • Optical Fiber Technology
  • F.I El-Nahal +1
  • Research Article

Butt-joint design in a uni-traveling carrier photodiode array monolithic with an arrayed waveguide grating by the selective area growth technique

  • Jan 01, 2017
  • Acta Physica Sinica
  • Ye Han +7
  • Research Article
  • Citations71

Optical FFT/IFFT circuit realization using arrayed waveguide gratings and the applications in all-optical OFDM system

  • Feb 23, 2011
  • Optics Express
  • Zhenxing Wang +3
  • Research Article
  • Citations3

Fabrication of a 17 × 17 polymer arrayed waveguide grating with flat spectral response

  • Jul 01, 2010
  • Microwave and Optical Technology Letters
  • Zheng-Kun Qin +1
  • Research Article
  • Citations24

Compact Hybrid Integrated 100-Gb/s Transmitter Optical Sub-Assembly Using Optical Butt-Coupling Between EADFB Lasers and Silica-Based AWG Multiplexer

  • Feb 01, 2016
  • Journal of Lightwave Technology
  • Takaharu Ohyama +10
  • Conference Article

Planar integrated photonics spectrograph on silicon-nitride-on-insulator: densely integrated systems for astrophotonics and spectroscopy

  • Sep 13, 2012
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Harendra N J Fernando +6
  • Research Article
  • Citations14

SOI-based arrayed waveguide grating with extended dynamic range for fiber Bragg grating interrogator

  • Jan 01, 2022
  • Optical Fiber Technology
  • Siming Weng +4
  • Conference Article

Simulating the study of exoplanets using photonic spectrographs

  • Mar 05, 2022
  • Marcos Perez +5
  • Research Article
  • Citations16

Investigation of Ultrasmall <inline-formula> <tex-math notation="LaTeX">$1\times N$</tex-math></inline-formula> AWG for SOI-Based AWG Demodulation Integration Microsystem

  • Dec 01, 2015
  • IEEE Photonics Journal
  • Hongqiang Li +3
  • Research Article

Statistical Modeling for Estimating Chromatic Dispersion in Filters Using Arrayed Waveguide Gratings With Random Phase Errors

  • Jul 01, 2013
  • Journal of Lightwave Technology
  • K Maru
  • PDF
  • Research Article
  • Citations4

Optimal design of linear tapered double S-shaped arrayed waveguide grating for broad channel spacing on silicon-on-insulator

  • Aug 28, 2014
  • Optical Engineering
  • Nurjuliana Juhari +3
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.