• Home
  • Search
  • Fast and realistic 3D feature profile simulation platform for plasma etching process
  • Cite Icon20
  • https://doi.org/10.1088/1361-6463/ac58cfCopy DOI Icon

Fast and realistic 3D feature profile simulation platform for plasma etching process

Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

We present a topographic simulation platform that simultaneously considers 3D surface movement, neutral and ion transport, and surface reactions in plasma high-aspect-ratio (HAR) oxide etching. The hash map data structure is considered for an effective 3D level-set algorithm with parallelized computations to calculate surface moving speed. Neutral and ion transport within nanoscale semiconductor geometry is parallelized with a graphics processing unit (GPU) so that the speedup ratio, as compared to a single central processing unit (CPU), is approximately 200. The surface reaction based on a two-layer model was incorporated into a 3D feature profile simulation platform with CPU parallelization. Finally, our simulation platform demonstrates that adaptive surface meshing can drastically decrease the computational load with a parallelized numerical platform.

Similar Papers
  • Research Article
  • Citations3

Improved numerical solution of anisotropic poroelastic wave equation in microseismicity: Graphic process unit acceleration and moment tensor implementation

  • Mar 19, 2024
  • Geophysical Prospecting
  • Jing Zheng +3
  • Research Article
  • Citations13

Practical parallel AES algorithms on cloud for massive users and their performance evaluation

  • Dec 17, 2015
  • Concurrency and Computation: Practice and Experience
  • Xiongwei Fei +3
  • Research Article
  • Citations26

Efficient methods for implementation of multi-level nonrigid mass-preserving image registration on GPUs and multi-threaded CPUs

  • Jan 06, 2016
  • Computer Methods and Programs in Biomedicine
  • Nathan D Ellingwood +3
  • PDF
  • Research Article
  • Citations25

DdcMD: A fully GPU-accelerated molecular dynamics program for the Martini force field.

  • Jul 23, 2020
  • The Journal of Chemical Physics
  • Xiaohua Zhang +8
  • Research Article

Improving MSAProbs Algorithm performance and Parallel Computing using GPU

  • Apr 18, 2023
  • International Journal of Computer Applications
  • Sally Zaki El-Hadary +2
  • Research Article
  • Citations4

A systematic parallel strategy for generating contours from large-scale DEM data using collaborative CPUs and GPUs

  • Feb 18, 2021
  • Cartography and Geographic Information Science
  • Chen Zhou +1
  • Research Article
  • Citations31

GPU acceleration of MPAS microphysics WSM6 using OpenACC directives: Performance and verification

  • Oct 14, 2020
  • Computers & Geosciences
  • Jae Youp Kim +2
  • PDF
  • Research Article
  • Citations7

LTTng CLUST: A System-Wide Unified CPU and GPU Tracing Tool for OpenCL Applications

  • Aug 19, 2015
  • Advances in Software Engineering
  • David Couturier +1
  • Research Article

SU‐E‐T‐423: Fast Photon Convolution Calculation with a 3D‐Ideal Kernel On the GPU

  • Jun 01, 2015
  • Medical Physics
  • S Moriya +2
  • Research Article
  • Citations6

Implementation of Image Enhancement Algorithms and Recursive Ray Tracing using CUDA

  • Jan 01, 2016
  • Procedia Computer Science
  • Mr Diptarup Saha +3
  • PDF
  • Research Article
  • Citations6

Parallelizing Multiple Flow Accumulation Algorithm using CUDA and OpenACC

  • Sep 03, 2019
  • ISPRS International Journal of Geo-Information
  • Natalija Stojanovic +1
  • Research Article
  • Citations12

HPMaX: heterogeneous parallel matrix multiplication using CPUs and GPUs

  • Oct 11, 2020
  • Computing
  • Homin Kang +2
  • PDF
  • Research Article
  • Citations1

GPU ACCELERATION OF DOPPLER BROADENING FOR NEUTRON TRANSPORT CALCULATIONS1

  • Jan 01, 2021
  • EPJ Web of Conferences
  • Paul E Burke +2
  • Research Article
  • Citations3

A parallel strategy to accelerate neighborhood operation for raster data coordinating CPU and GPU

  • Nov 06, 2023
  • Cartography and Geographic Information Science
  • Zhixin Yu +2
  • Research Article
  • Citations9

Accelerating image convolution filtering algorithms on integrated CPU–GPU architectures

  • May 04, 2018
  • Journal of Electronic Imaging
  • Yi Zhou +2
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.