Graphene-Coupled Terahertz Semiconductor Lasers for Enhanced Passive Frequency Comb Operation.

Frequency combs, spectra of phase-coherent equidistant lines, have revolutionized time and frequency metrology. The recently developed quantum cascade laser (QCL) comb has exhibits great potential with high power and broadband spectrum. However, in the terahertz (THz) range, cryogenic cooling has to be applied for THz QCL combs. We report a room temperature THz frequency comb at 3.0 THz based on difference-frequency generation from a mid-IR QCL comb. A largely detuned distributed-feedback grating is integrated into the QCL cavity to provide the single mode operation as well as enhanced spatial hole-burning effect for multimode comb operation. Multiheterodyne spectroscopy with multiple equally spaced lines by beating it with a reference Fabry-Pérot comb confirms the THz comb operation. This type of THz comb provides a new solution to chip-based high-speed high-resolution THz spectroscopy with compact size at room temperature.

We report a homogeneous quantum cascade laser (QCL) emitting at terahertz (THz) frequencies, with a total spectral emission of about 0.6 THz, centered around 3.3 THz, a current density dynamic range Jdr = 1.53, and a continuous wave output power of 7 mW. The analysis of the intermode beatnote unveils that the devised laser operates as an optical frequency comb (FC) synthesizer over the whole laser operational regime, with up to 36 optically active laser modes delivering ∼200 µW of optical power per optical mode, a power level unreached so far in any THz QCL FC. A stable and narrow single beatnote, reaching a minimum linewidth of about 500 Hz, is observed over a current density range of 240 A/cm2 and even across the negative differential resistance region. We further prove that the QCL FC can be injection locked with moderate radio frequency power at the intermode beatnote frequency, covering a locking range of 1.2 MHz. The demonstration of stable FC operation, in a QCL, over the full current density dynamic range, and without any external dispersion compensation mechanism, makes our proposed homogenous THz QCL an ideal tool for metrological applications requiring mode-hop electrical tunability and a tight control of the frequency and phase jitter.

Terahertz (THz) quantum cascade lasers (QCL) are currently increasing in popularity. It is expected to become the main source of emerging terahertz radiation technology and applications. However to produce the device within the application specification is costly and time consuming. This is because the manufacturing process of the superlattice growth and the device processing and testing are long and expensive processes. Thus a prediction tool is needed to overcome the problems in designing and producing THz QCL within the needed optical expectation. The density matrix method is used to calculate the performance of this device electronically and optically. The result obtained was compared to the experimental result conducted by previous researchers. The calculation result showed that the gain is 20 when the population inversion occurs at threshold current density of 400 A cm-2. Meanwhile a negative gain or loss occurs below 350 A cm-2. As a conclusion, it is demonstrated that this method has a capability to explain the transport phenomena as well as to predict the performance of the THz QCL device design.

In the terahertz frequency range, the commercialized spectrometers, such as the Fourier transform infrared and time domain spectroscopies, show spectral resolutions between a hundred megahertz and a few gigahertz. Therefore, the high precision frequency tuning ability of terahertz lasers cannot be revealed by these traditional spectroscopic techniques. In this work, we demonstrate a laser beating experiment to investigate the frequency tuning characteristics of terahertz quantum cascade lasers (QCLs) induced by temperature or drive current. Two terahertz QCLs emitting around 4.2 THz with identical active regions and laser dimensions (150 µm wide and 6 mm long) are employed in the beating experiment. One laser is operated as a frequency comb and the other one is driven at a lower current to emit a single frequency. To measure the beating signal, the single mode laser is used as a fast detector (laser self-detection). The laser beating scheme allows the high precision measurement of the frequency tuning of the single mode terahertz QCL. The experimental results show that in the investigated temperature and current ranges, the frequency tuning coefficients of the terahertz QCL are 6.1 MHz/0.1 K (temperature tuning) and 2.7 MHz/mA (current tuning) that cannot be revealed by a traditional terahertz spectrometer. The laser beating technique shows potential abilities in high precision linewidth measurements of narrow absorption lines and multi-channel terahertz communications.

Dual‐comb sources with equally spaced and low phase noise frequency lines are of great importance for high resolution spectroscopy and metrology. In the terahertz frequency range, electrically pumped semiconductor quantum cascade lasers (QCLs) are suitable candidates for frequency comb and dual‐comb operation. Although free running terahertz QCLs can be operated as frequency combs and dual‐comb sources, the phase noise originated from the carrier frequency and repetition rate instabilities are relatively high, which hinders the high precision applications. The locking techniques that have been used for a single laser comb can be, in principle, applied to a dual‐comb laser source. However, the complete locking of dual‐comb lines considerably complicates the implementation of such a system. Here, a method is proposed to stabilize a terahertz QCL dual‐comb source by phase locking one dual‐comb line. Although only one dual‐comb line is locked, it is shown that the phase noise of other dual‐comb lines close to the phase locked line is significantly reduced. Finally, it is demonstrated that the terahertz QCL comb without a control of the repetition rate can produce pulsed‐type waveforms. The demonstrated approach provides a convenient method to actively stabilize terahertz dual‐comb laser sources, which can be further utilized for fast gas sensing and spectroscopy.

Quantum cascade lasers (QCLs) emitting in terahertz frequency range are the ideal candidates for generating high power radiation in the frequency range between 1 and 5 THz. In this work, we report the frequency comb generation based on terahertz QCLs via active and passive methods. Using the active radio frequency modulation, the spectral coverage of the QCL comb can continuously span over 300 GHz. By integrating a passive saturable absorber into the laser cavity, we demonstrate self-reduction in phase noise of up to 20 dB and self-stabilization of inter-mode beat note linewidth of down to 30 kHz.

Passive mode-locking in quantum cascade lasers (QCLs) remains one of the huge challenges because of the fast relaxation time of the excited carriers which is typically in the range of sub-picoseconds. The use of conventional techniques such as the semiconductor saturable absorber mirror is inefficient because the spatial hole burning effect dominates the carrier dynamics. To overcome this effect, longitudinal transition structures with relaxation time around $$50~\mathrm {ps}$$ were proposed. However, mode-locking is assured with an external modulation at a cavity roundtrip frequency. In this paper, we demonstrate that a single-layer graphene used as a saturable absorber permits to generate stable pulses in such structures. The graphene is integrated with a highly reflective mirror to increase the internal electric field and achieve the saturation intensity. The dynamic of the QCL is modeled with Maxwell-Bloch equations while Maxwell-Ampere equation is used for the graphene layer by considering a nonlinear conductivity. This system of equations is solved using the one-dimensional Finite-Difference Time-Domain ( FDTD) method. To model the single-layer graphene of a $$0.33~\mathrm {nm}$$ thickness, a specific sub-cell is implemented based on Maloney method. Simulation results of a $${\mkern 1mu} 6.2~\mu {\text{m}}$$ QCL with a diagonal radiative transition show a generation of isolated pulses with a peak electric field of $$80~\mathrm {MV.m^{-1}}$$ and a duration of $$51~\mathrm {fs}$$ . The mode-locking remains stable for QCLs with a vertical transition having a relaxation time below $$5~\mathrm {ps}$$ .

We report on a heterogeneous active region design for terahertz quantum cascade laser based frequency combs. Dynamic range, spectral bandwidth and output power have been significantly improved with respect to previous designs. When individually operating the lasers, narrow and stable intermode beatnote indicate frequency comb operation up to a spectral bandwidth of 1.1 THz, while in a dispersion-dominated regime a bandwidth up to 1.94 THz at a center frequency of 3 THz can be reached. A self-detected dual-comb setup has been used to verify the frequency comb nature of the lasers.

Stabilization of quantum-cascade-laser frequency combs by means of external optical feedback is presented. Experimental results suggest reduced phase-noise in the frequency comb, allowing comb operation in previously unstable regimes. © 2019 The Authors

The single lobe far-field patterns produced from terahertz quantum cascade lasers (QCLs) are greatly demanded for various applications, such as imaging, data transmission, etc. However, for a ridge waveguide terahertz QCL, the far-field beam divergence is large due to the fact that the waveguide aperture is far smaller than the terahertz wavelength. This is the case typically for double-metal waveguide terahertz QCL which emits terahertz photons in almost every direction in the space. Even for a single plasmon waveguide terahertz QCL, the divergence angle is as large as 30 in both horizontal and vertical direction. Here, in this work we design and fabricate a double metal third-order distributed feedback terahertz QCL emitting around 4.3 THz, and investigate the characteristics of the longitudinal and transverse modes. This work aims to achieve high beam quality for terahertz QCL by exploiting the third-order distributed feedback geometry, and in the meantime to achieve single longitudinal mode operation. The electromagnetic field distribution in the waveguide is modelled by employing a finite element method. The mode selection mechanism is studied by using the eigen frequency analysis, and the far-field beam is simulated by applying the near-field to far-field Fourier transform technique. The QCL active region used in this work is based on the resonant-phonon design, which is grown by a molecular beam epitaxy (MBE) system on a semi-insulating GaAs (100) substrate. The wafer bonding and traditional semiconductor device fabrication technology, i.e., optical lithography, electron beam evaporation, lift-off, wet and dry etching, are used to process the MBE-growth wafer into the third-order distributed feedback geometry with double-metal waveguides. By carefully designing the grating structures and optimizing the fabrication process, we achieve third-order distributed feedback terahertz QCL with quasi-single-longitudinal mode operation and single lobe far-field beam pattern with low beam divergence in both vertical and horizontal directions. The effect of grating duty cycle on the far-field beam divergence is systematically studied theoretically and experimentally. By the simulation, we finally achieve the divergence angle of 1213 for a third-order distributed feedback laser with a grating duty cycle of 12% that results in an effective refractive index close to 3. The experimental results show good agreement with the simulation. There is still room to further reduce the beam divergence of third-order distributed feedback terahertz QCL by improve the accuracy of the simulation and the fabrication.

Stable operation is one of the most important requirements for a laser source for high-precision applications. Many efforts have been made to improve the stability of lasers by employing various techniques, e.g., electrical and/or optical injection and phase locking. However, these techniques normally involve complex experimental facilities. Therefore, an easy implementation of the stability evaluation of a laser is still challenging, especially for lasers emitting in the terahertz (THz) frequency range because the broadband photodetectors and mature locking techniques are limited. In this work, we propose a simple method, i.e., relative phase locking, to quickly evaluate the stability of THz lasers without a need of a THz local oscillator. The THz laser system consists of a THz quantum cascade laser (QCL) frequency comb and a single-mode QCL. Using the single-mode laser as a fast detector, heterodyne signals resulting from the beating between the single-mode laser and the comb laser are obtained. One of the heterodyne beating signals is selected and sent to a phase-locked loop (PLL) for implementing the relative phase locking. Two kinds of locks are performed by feeding the output error signal of the PLL, either to the comb laser or to the single-mode laser. By analyzing the current change and the corresponding frequency change of the PLL-controlled QCL in each phase-locking condition, we, in principle, are able to experimentally compare the stability of the emission frequency of the single-mode QCL (fs) and the carrier envelope offset frequency (fCEO) of the QCL comb. The experimental results reveal that the QCL comb with the repetition frequency injection locked demonstrates much higher stability than the single-mode laser. The work provides a simple heterodyne scheme for understanding the stability of THz lasers, which paves the way for the further locking of the lasers and their high-precision applications in the THz frequency range.

The frequency comb which is characterized by equally-spaced frequency lines with high mode coherence has received much attention since its first demonstration in near-infrared and optical frequency range. In the terahertz frequency range, the electrically-pumped terahertz quantum cascade laser (THz QCL) based on semiconductors is an ideal candidate for achieving frequency comb operation in a frequency range between 1 THz and 5 THz. The group velocity dispersion (GVD) is a key factor for the frequency comb. A higher GVD can pull the frequencies from their equidistant values and limit the comb bandwidth. Therefore the laser dispersion needs to be compensated for in order to make the total GVD sufficiently low and flat, such as using a Gires-Tournois interferometer (GTI) or the double chirped mirror (DCM). However, a successful design still depends on the knowledge of the total GVD in the laser. In this paper, we show how to calculate the GVD in metal-metal waveguide THz QCLs by taking into account the dispersions from the GaAs material, the waveguide, and the laser gain, which conduces to the understanding of the frequency comb behavior. The waveguide loss is modelled by the finite element method. The loss due to intersubband absorption is calculated by Fermi's gold rule. All the losses, i.e., waveguide loss, mirror loss, and intersubband absorption loss, are summed up to calculate the clamped gain. The material loss can be calculated by using the reststrahlen band model. Because of these losses and gain, the refractive index needs to be replaced by a complex refractive index. The real part of the complex refractive index is the refractive index, which can be calculated from the Kramers-Kronig relationship that connects the loss or gain with the refractive index. Then the GVD introduced by the material loss, waveguide loss, and clamped gain can be finally calculated. The results show that the total GVD of THz QCL is approximately –8 × 10<sup>5</sup>~8 × 10<sup>5</sup> fs<sup>2</sup>/mm which is strongly determined by the clamped gain. Finally, the developed numerical model is employed to study the dispersion compensation effect of a GTI mirror which is coupled into a QCL gain cavity. The design of the THz QCL based on GTI structure is more flexible and feasible than that of the DCM. The result shows that by carefully designing the geometry of GTI, the dispersion of a THz QCL can be compensated for, thus achieving the broadband terahertz frequency combs.

Frequency‐modulated (FM) combs feature flat intensity spectra with a linear frequency chirp, useful for metrology and sensing applications. Generating FM combs in semiconductor lasers generally requires a fast saturable gain, usually limited by the intrinsic gain medium properties. Here, it is shown how a spatial modulation of the laser gain medium can enhance the gain saturation dynamics and nonlinearities to generate self‐starting FM combs. This is demonstrated with tapered planarized terahertz (THz) quantum cascade lasers (QCLs). While simple ridge THz QCLs typically generate combs presenting a mixture of amplitude and frequency modulation, the on‐chip field enhancement resulting from extreme spatial confinement leads to an ultrafast saturable gain regime, generating a pure FM comb with a flatter intensity spectrum and a clear linear frequency chirp. The observed linear frequency chirp is reproduced using a spatially inhomogeneous mean‐field theory model, which confirms the crucial role of field enhancement. In addition, the modified spatial temperature distribution within the waveguide results in an improved high‐temperature comb operation, up to a heat sink temperature of 115 K, with comb bandwidths of 600 GHz at 90 K. The spatial inhomogeneity leads as well to very intense radio frequency (RF) beatnotes up to ‐30 dBm and facilitates dynamic switching between various harmonic states in the same device.

Terahertz quantum cascade lasers (QCLs) with a broadband gain medium could play an important role for sensing and spectroscopy since then distributed-feedback schemes could be utilized to produce laser arrays on a single semiconductor chip with wide spectral coverage. QCLs can be designed to emit at two different frequencies when biased with opposing electrical polarities. Here, terahertz QCLs with bidirectional operation are developed to achieve broadband lasing from the same semiconductor chip. A three-well design scheme with shallow-well GaAs/Al0.10Ga0.90As superlattices is developed to achieve high-temperature operation for bidirectional QCLs. It is shown that shallow-well heterostructures lead to optimal quantum-transport in the superlattice for bidirectional operation compared to the prevalent GaAs/Al0.15Ga0.85As material system. Broadband lasing in the frequency range of 3.1–3.7 THz is demonstrated for one QCL design, which achieves maximum operating temperatures of 147 K and 128 K respectively in opposing polarities. Dual-color lasing with large frequency separation is demonstrated for a second QCL, that emits at ~3.7 THz and operates up to 121 K in one polarity, and at ~2.7 THz up to 105 K in the opposing polarity. These are the highest operating temperatures achieved for broadband terahertz QCLs at the respective emission frequencies, and could lead to commercial development of broadband terahertz laser arrays.

Recently, a novel type of molecular THz laser with ∼mW-level output power was demonstrated [1,2]. This laser is optically pumped by a mid-IR Quantum Cascade Laser (QCL), therefore resulting in a much more compact, frequency agile and deployable source compared to standard, CO 2 -laser pumped, far-infrared gas lasers. This achievement has revived the interest for molecular THz lasers, in particular for their exploitation as low-phase noise THz local oscillators (LOs) operating at room temperature. Compared to CO 2 -laser pumping, a QCL pump offers an unrivalled frequency agility that allows accessing an unprecedented number of molecular transitions. On the other hand, its lower frequency stability can potentially impact the frequency noise of the THz laser source [3–5]. Here we report the first measurement of the frequency noise power spectral density (PSD) of a 1.073THz ammonia laser pumped by a 10.3μm QCL. This is achieved by using a commercial harmonic mixer to generate a beating between the ammonia laser frequency and the 1080th harmonic of the 1GHz repetition rate of a custom-made, 1560nm frequency comb (FC). We then exploit a voltage-controlled oscillator to track the beat-note signal and realize the frequency to amplitude conversion [6]. The measured frequency noise PSD is shown in Fig.1. In the range ∼30–100kHz we find a frequency noise 2 -pumped, 2.5THz methanol laser, reaching 0.1Hz2/Hz (−110dBc) at 40kHz from the carrier, limited by the frequency noise of the FC harmonic. Finally, we will show that it is possible to actively phase-lock the QCL-pumped ammonia laser to the FC repetition rate harmonic by controlling the QCL drive current, demonstrating a sub-Hz linewidth. These results pave the way to the development of QCL-pumped molecular lasers as compact, low-phase noise THz sources operating a room temperature.