- Book Chapter
- 10.1007/978-1-4615-1797-9_18
X-Ray Rocking Curve Analysis of Strained Heterointerfaces and Quantum Wells
- Jan 01, 1995
- Advances in X-ray Analysis
- C. R. Wie
A detailed discussion is given for the x-ray rocking curve analysis of semiconductor heterointerfaces and strained quantum wells using x-ray interferometry. It is shown that for a single beteroepitaxial layer sample and a multiple quantum well sample, the heterointerface where the composition changes in both anion and cation sublattices can be studied with a half monolayer sensitivity by analyzing the x-ray rocking curve profile. Such sample systems include GaInAs/InP, InGaSb, GaInP/GaAs, ZnSe/GaAs, etc. A simple kinematical diffraction principle involved in the x-ray analysis is explained. Namely, the relative phase difference between the reflection amplitudes of any two layers depends on the total sum of strain (or mismatch)-thickness products over the intervening layers and interfaces. The x-ray interferometry is also effective in measuring the strain-thickness product of strained quantum wells. Experimental data and analysis results are presented for a series of functional device structures having a strained quantum well. For a more complicated sample structure which involves both a (strained) quantum-effect layer and gained interfaces, it is shown that the x-ray interferometry is only capable of providing the total strain-thickness product over the quantum layer and the surrounding interfaces, but no detailed information about the interface grading can be gained frommore » the rocking curve analysis alone if only one isolated sample is measured. An experimental data of such a sample, 0.3{mu}m-GaAs/100{Angstrom}-GaInP/GaAs(001), is analyzed. 15 refs., 6 figs.« less
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