11- https://doi.org/10.1016/s0921-5107(02)00637-2
Improved reproducibility in scanning capacitance microscopy for quantitative 2D carrier profiling on silicon
- Jan 31, 2003
- Materials Science and Engineering: B
- D Goghero +2 more
Abstract
Improved reproducibility in scanning capacitance microscopy for quantitative 2D carrier profiling on silicon
- # Wet Chemical Oxides
- # Reproducibility Of Measurements
- # Wet Chemical Oxidation
- # Diamond-coated Probes
- # Diamond-coated Probe
- # Scanning Capacitance Microscopy
- # Signal Variation
- # Tip Wear
- # Multiple Scans
- # Single Scan
