• Home
  • Search
  • Integration of flexible strain sensor using liquid metal into soft micro-actuator
  • Cite Icon19
  • https://doi.org/10.1109/memsys.2018.8346617Copy DOI Icon

Integration of flexible strain sensor using liquid metal into soft micro-actuator

  • Jan 1, 2018
  • Shohei Otake +1 more
Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

This paper presents a soft micro-finger composed of a soft micro-actuator and a flexible micro-sensor. Proposed micro-finger is, for the first time, integrated with a pneumatic balloon actuator (PBA) and a strain sensor using liquid metal. Both actuator and sensor can be formed by simple structures with cavities or channels sandwiched by two thin films. The strain sensor is fabricated by filling the space with liquid metal. Proposed design can provide simple batch-fabrication of integrated actuators and sensors for soft micro-fingers. We could succeed in detecting the motion of PBA (560μm×130μm×900μm) by the liquid metal based strain sensor (50μm×50μm×2mm). The gage factor of demonstrated strain sensor is estimated at 0.8. We can say the combination of proposed actuator and sensor is excellent in terms of both fabrication and performance.

Similar Papers
  • PDF
  • Research Article
  • Citations23

Corrugated Photoactive Thin Films for Flexible Strain Sensor

  • Oct 13, 2018
  • Materials
  • Donghyeon Ryu +1
  • Research Article
  • Citations27

Ultrasensitive and highly stretchable bilayer strain sensor based on bandage-assisted woven fabric with reduced graphene oxide and liquid metal

  • Mar 27, 2024
  • Chemical Engineering Journal
  • Yankun Lin +4
  • Research Article
  • Citations13

Stress-deconcentrated ultrasensitive strain sensor with hydrogen-bonding-tuned fracture resilience for robust biomechanical monitoring

  • Mar 17, 2022
  • Science China Materials
  • Yizhuo Yang +15
  • Research Article
  • Citations30

Reduced graphene oxide-coated carbonized cotton fabric wearable strain sensors with ultralow detection limit

  • Aug 30, 2020
  • Journal of Materials Science: Materials in Electronics
  • Qingqing Liu +9
  • Research Article
  • Citations163

Multifunctional Conductive Hydrogel/Thermochromic Elastomer Hybrid Fibers with a Core-Shell Segmental Configuration for Wearable Strain and Temperature Sensors.

  • Jan 23, 2020
  • ACS Applied Materials & Interfaces
  • Jingxuan Chen +7
  • Conference Article

A Silanized MCNT/TPU-based Flexible Strain Sensor with High Stretchability for Deformation Monitoring of Laminated Elastomeric Bridge Bearings

  • Jan 01, 2022
  • Report
  • Yong Yuan +1
  • Research Article
  • Citations145

Carbon/graphene composite nanofiber yarns for highly sensitive strain sensors

  • Feb 03, 2018
  • Materials & Design
  • Tao Yan +3
  • Conference Article

Optimization of Nickel Contents for Ni-Based Liquid Metal Strain Sensors

  • Dec 01, 2025
  • Jing Zhang +4
  • Conference Article

Polypyrrole coated rubber as flexible strain sensor for large strain measurement

  • Apr 02, 2012
  • Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
  • Arief P Tjahyono +2
  • Research Article
  • Citations24

Fabrication of a Flexible Strain Sensor with High‐Aspect‐Ratio Liquid‐Metal Galinstan

  • Aug 21, 2022
  • Advanced Materials Technologies
  • Hongji Guo +6
  • Research Article
  • Citations117

Hollow-porous fiber-shaped strain sensor with multiple wrinkle-crack microstructure for strain visualization and wind monitoring

  • Jan 09, 2023
  • Nano Energy
  • Xinxin Zhao +6
  • Research Article
  • Citations62

A flexible and highly sensitive graphene-based strain sensor for structural health monitoring

  • Jan 18, 2018
  • Cluster Computing
  • Meng Nie +2
  • Conference Article
  • Citations10

Nickel-based Piezoresistive Sensors Obtained on Flexible Nanocellulose Substrate

  • Sep 05, 2021
  • Viktoriia Koval +5
  • Research Article
  • Citations17

An Electronic Skin Strain Sensor for Adaptive Angle Calculation

  • Jul 01, 2022
  • IEEE Sensors Journal
  • Yuxin Peng +5
  • Research Article
  • Citations124

Carbon fiber–ZnO nanowire hybrid structures for flexible and adaptable strain sensors

  • Jan 01, 2013
  • Nanoscale
  • Qingliang Liao +5
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.