- Research Article
1
- 10.7049/jcyu.201207.0013
Precise Positioning Control of the Single-Axis Piezoelectric Actuated Stage by using Fuzzy Control Law
- Jul 01, 2012
- Shann-Chyi Mou + 1 more +1
In this research, we used the self-designed piezoelectric actuated stage to achieve the nanometer level precise positioning control through the design of the fuzzy controller. A novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive the stage. The movement of the piezoelectric actuated stage is read and analyzed by means of NI PCI-6115 data acquisition card and LabVIEW software operating in conjunction with a linear encoder. The new consideration of tuning time T(subscript on) is used to place of traditional method of changing the magnitude of driving voltage to control the stepping distance of the stage. Under a constant driving voltage, the stride of the stage increases with time T(subscript on), and the stride of the stage decreases with time T(subscript on). According to the control experiment, the piezoelectric actuator stage would be reached below 1 μm levels by the fuzzy controller which is designed for this experiment, has been demonstrated. Furthermore, the purpose of control could be achieved by changing the time T(subscript on) which has been demonstrated.
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