• Home
  • Search
  • Investigation of Particulate Growth Processes in RF Silane Plasmas Using Light Absorption and Scanning Electron Microscopic Methods
  • Cite Icon21
  • https://doi.org/10.1143/jjap.33.4198Copy DOI Icon

Investigation of Particulate Growth Processes in RF Silane Plasmas Using Light Absorption and Scanning Electron Microscopic Methods

Show More
  • Abstract
  • Literature Map
  • References
  • Citations
  • Similar Papers
Abstract

Particulate growth processes in Ar+SiH4 RF plasmas are studied using ultraviolet light-absorption and scanning electron microscopic (SEM) methods. Measurements of particulate size and density using the SEM method show that they grow through three phases: nucleation, rapid growth and growth saturation. Such features of temporal evolutions of their size and density are very similar to those for He+SiH4 RF plasmas previously obtained by SEM and in situ laser light scattering methods. It is also found that particulates in two different size ranges coexist after the initiation of the rapid growth phase, and their coagulation plays an important role in this phase. Close similarities among spatial profiles of Si emission intensity, Si density, and amount of particulates are revealed in wide discharge-parameter ranges of 1–100% SiH4, 11–20 Pa, and 40–100 W. These results suggest that many short-lifetime neutral radicals such as SiHn (n=0–2) contribute to nucleation and subsequent initial growth of a particulate, since other short-lifetime radicals are also expected to have similar spatial profiles.

Similar Papers
  • Research Article
  • Citations5

A morphological study of dentinal nerve endings

  • Dec 01, 1988
  • Journal of Endodontics
  • Kouichi Ochi +1
  • Research Article
  • Citations2

Application of Nanocomposite Track Membranes for Electron Microscopy Samples Preparation

  • Dec 01, 2014
  • Advanced Materials Research
  • N.A Khlebnikov +4
  • Research Article
  • Citations30

Study on growth processes of particles in germane radio frequency discharges using laser light scattering and scanning electron microscopic methods

  • Jun 01, 1998
  • Journal of Applied Physics
  • Hiroharu Kawasaki +5
  • Research Article
  • Citations2

Comparative Analysis of Different Methods of Scanning Electron Microscopy and Test Preparation in Biological Tissue Studies

  • May 01, 2019
  • Crystallography Reports
  • R A Kamyshinskii +7
  • Research Article
  • Citations1

Study of the surface architectonics of human erythrocytes by the method of scanning electron microscopy in the presence of doxycycline.

  • Jul 01, 2014
  • Bulletin of experimental biology and medicine
  • E S Baeva +1
  • Research Article
  • Citations6

Frozen Resin Cracking Method for Scanning Electron Microscopy and its Application to Cytology

  • Aug 01, 1972
  • Proceedings, annual meeting, Electron Microscopy Society of America
  • K Tanaka +1
  • Research Article
  • Citations57

Experimental investigation on the combustion characteristics of aluminum in air

  • Jun 29, 2016
  • Acta Astronautica
  • Yunchao Feng +3
  • Research Article

Experimental Study on Aging Characteristics of Liquid Silicone Rubber Sheds for Composite Bushing

  • Apr 01, 2015
  • Advanced Materials Research
  • Meng Zhou Zhu +3
  • Research Article
  • Citations68

Thermoluminescence dating of coastal sand dunes at Cooloola and North Stradbroke Island, Australia

  • Jan 01, 1990
  • Australian Journal of Soil Research
  • Ms Tejan-Kella +5
  • Research Article
  • Citations9

Detection of epidermal growth factor receptor by scanning electron microscopy

  • Feb 01, 1994
  • Histochemistry
  • U Heinzmann +1
  • Research Article

Towards YMD (Y-Modulation Detection Algorithms and Devices) Applications in CryoSEM for Surface Studies of Superconductors: Per Aspera ad Astra

  • Mar 27, 2026
  • Annals of Mathematics and Physics
  • Aleksandrov Pl +3
  • Research Article
  • Citations11

Structural and phase transformations, mechanical properties, and shape-memory effects in quasibinary Ni50Ti38Hf12 alloy obtained by quenching from the melt

  • Dec 01, 2016
  • The Physics of Metals and Metallography
  • V G Pushin +5
  • Research Article
  • Citations2

Formation of Ge/Si and Ge/Ge x Si1−x /Si nanoheterostructures by molecular beam epitaxy

  • May 01, 2014
  • Optoelectronics, Instrumentation and Data Processing
  • A I Nikiforov +3
  • Research Article
  • Citations8

Comparative Study on Reused Haemodialysis Membranes

  • Jul 01, 1996
  • The International Journal of Artificial Organs
  • P Sótonyi +5
  • Book Chapter
  • Citations27

Organic-Inorganic Materials for Baromembrane Separation

  • Jan 01, 2017
  • Yurii Zmievskii +6
Cactus Communications logo

Copyright 2026 Cactus Communications. All rights reserved.