- Research Article
29
- 10.1016/j.mee.2010.06.029
Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO 2/p-Si structure
- Jun 23, 2010
- Microelectronic Engineering
- Xiao-Rong Wang + 6 more +6
Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO 2/p-Si structure