- Research Article
1
- 10.1016/s1474-6670(17)38790-6
Real-Time Feedback Control of Carbon Content of Zirconium Dioxide Thin Films Using Optical Emission Spectroscopy
- Jan 01, 2004
- IFAC Proceedings Volumes
- Dong Ni + 4 more +4
Real-Time Feedback Control of Carbon Content of Zirconium Dioxide Thin Films Using Optical Emission Spectroscopy