Rarefied Gas Flows in Micro-Channels

The flow characteristics and heat transfer in micro couette flow were studied numerically using three methods: Burnett equations, direct simulation Monte Carlo (DSMC) method and information preservation (IP) method. The results of these three methods are compared to each other. Convergent solutions to the conventional Burnett equations with second order velocity-slip and temperature-jump boundary conditions were obtained on arbitrary fine numerical grids for all Knudsen numbers (Kn) up to the limit of the equations' validity. The non-dimensional wall shear stress and heat flux shows good agreement with DSMC results and are better than first order slip boundary condition. The velocity slip and temperature jump calculated from Burnett equations fit DSMC results well when Kn < 0.3 but departure at higher Kn number. The IP method shows an identical velocity distribution with DSMC at low speed, but costs much less time. Perfect agreement was achieved in the density, velocity, temperature and pressure distributions between the results of Burnett equations and IP method at Kn = 0.02 and 0.1. Burnett equations and IP method are better than Navier-Stokes equation and DSMC method, respectively, in the flow and heat transfer in MEMS or NEMS systems

Direct Simulation Monte Carlo (DSMC) is a widely used statistical numerical simulation method based on molecular motion. But in terms of the DSMC method. When we are simulating the gas flow at low speed, he molecular thermal motion speed is bigger than the macroscopic movement speed. If we want to get meaningful statistics, we need a great deal of sampling number. So the DSMC method is not suitable for simulation of gas flow at low speed. Jing Fan and Qing Shen come up with Information Preservation (IP) method. In this paper, on the basis of theoretical analysis, we improved Matlab codes for the DSMC calculation of Couette flow. We compared DSMC method with IP method in numerical simulation of micro scale one-component gas flow at low speed to validate feasibility and accuracy of IP in gas flaw at low speed.

Gas flows in micro-channels are simulated using an open source Direct Simulation Monte Carlo (DSMC) code dsmcFOAM for general application to rarefied gas flow written within the framework of the open source C++ toolbox called OpenFOAM. Aim of this paper is to investigate the flow in micro-channel with bend with added curvature. Results are compared with flows in channel without added curvature and equivalent straight channel. Effects of micro-channel bend was already thoroughly investigated by White et al. Geometry proposed by White is also used here for refference.

The Boltzmann equation is the governing equation for rarefied gas dynamics, which is relevant to the aerodynamic design of rarefied hypersonic vehicles. Direct solution of the Boltzmann equation for realistic gas flows using either analytic or computational techniques is almost impossible. However, the Direct Simulation Monte Carlo (DSMC) method has been developed to provide realistic solutions for rarefied gas flows. Bird formally introduced this method hi 1969, and ever since several arguments have developed as to whether the DSMC method provides solutions of the Boltzmann equation. This paper demonstrates that the Boltzmann equation and the DSMC method have a common origin which rests on the fundamental tenets of kinetic theory. These fundamental tenets are mathematically condensed into the Boltzmann equation. On the other hand, the DSMC method is a numerical implementation of these same fundamental tenets. Thus, the Boltzmann equation and the DSMC method express the same idea but use a different language. The Boltzmann equation uses the language of mathematics whereas the DSMC method uses the language of physics. It is explained how both approaches are related and it is concluded that the DSMC method does indeed provide solutions of the Boltzmann equation. It is also shown that both approaches can be easily extended to a wider range of problems than the literature has recognised (such as to high-density gases and liquids). One important issue is how to set the range of the molecular potential used in deflection angle formulae. It is shown that, contrary to traditional expectations, within a macroscopic volume the range of the potential is always finite. Finally, the thorny issue of molecular chaos is examined and it is concluded that it is not as limiting as commonly feared.

Large statistical scatter and effective pressure boundary conditions are two critical problems in the computation of microchannel flows with the direct simulation Monte Carlo (DSMC) method. To address these issues, an extension of the DSMC-IP (information preservation) coupled method is developed from the one-dimensional case to the two-dimensional case for microchannel flow. Simulation results in a microchannel flow from DSMC, IP, and numerical and analytical solutions to the Navier-Stokes equations are compared. The DSMC-IP coupled method successfully reduces the large statistical scatter usually obtained with DSMC in such low-speed flow systems. It also provides a suitable implementation of pressure boundary conditions

Two‐dimensional compressible momentum equations were solved by a perturbation analysis and the PISO algorithm to investigate the effects of compressibility and rarefaction on the local flow resistance of isothermal gas flow in circular microchannels. The computations were performed for a wide range of Reynolds numbers and inlet Mach numbers. The explicit expression of the normalized local Fanning friction factor along the microchannel was derived in the present paper. The results reveal that the local Fanning friction factor is a function of the inlet Mach number, the Reynolds number and the length‐diameter ratio of the channel. For larger Reynolds and inlet Mach numbers, the friction coefficient in the microchannel is higher than the value in a macrotube, and the gas flow in the microchannel is dominated only by compressibility. For smaller Reynolds and inlet Mach numbers, the Fanning friction factor of gas flow in the microchannel is lower than that in a circular tube of conventional size due to slip flow at the wall and thus, rarefaction has a significant effect on the fluid flow characteristics in a microchannel.

Studies on Gas Flow through Smooth Microchannel Surface – Fabrication, Characterization, Analysis, and Tangential Momentum Accommodation Coefficient Comparison

Gas flow and heat transfer in confined geometries at micro-and nanoscales differ considerably from those at macro-scales, mainly due to nonequilibrium effects such as velocity slip and temperature jump. Nonequilibrium effects increase with a decrease in the characteristic length-scale of the fluid flow or the gas density, leading to the failure of the standard Navier–Stokes–Fourier (NSF) equations in predicting thermal and fluid flow fields. The direct simulation Monte Carlo (DSMC) method is employed in the present work to investigate pressure-driven nitrogen flow in divergent microchannels with various divergence angles and isothermal walls. The thermal fields obtained from numerical simulations are analysed for different inlet-to-outlet pressure ratios (1.5≤Π≤2.5), tangential momentum accommodation coefficients, and Knudsen numbers (0.05≤Kn≤12.5), covering slip to free-molecular rarefaction regimes. The thermal field in the microchannel is predicted, heat-lines are visualised, and the physics of heat transfer in the microchannel is discussed. Due to the rarefaction effects, the direction of heat flow is largely opposite to that of the mass flow. However, the interplay between thermal and pressure gradients, which are affected by geometrical configurations of the microchannel and the applied boundary conditions, determines the net heat flow direction. Additionally, the occurrence of thermal separation and cold-to-hot heat transfer (also known as anti-Fourier heat transfer) in divergent microchannels is explained.

Reduced mass flow rates of a rarefied Couette and Poiseuille flow in a long rectangular channel are calculated in the whole range of the gas rarefaction and a wide range of the width to height ratio. Furthermore, walls may be made of different materials so that different tangential momentum accommodation coefficients (TMACs) may be applied. Analytical solutions are given for the slip regime, where all four surrounding walls may have a different TMAC. Due to a simplified modeling assumption, these solutions can be used to correct the well-known flow rates of a fully diffuse channel for different TMACs in the whole range of the gas rarefaction. If the slip solution and the diffuse solution are known, the procedure can principally be adapted for any channel shape. The results of the analytical model expressions are validated with simulation data of the plane Couette and Poiseuille flow and the Poiseuille flow through a pipe, which are found in the literature. In addition, the analytical solution is compared to results of the Direct Simulation Monte Carlo (DSMC) method of a Couette and a Poiseuille flow in a rectangular channel, which are provided as tabulated data for a variation of the gas rarefaction parameter at different aspect ratios and different combinations of TMACs. The procedure to calculate the mass flow rate of the certain flow as well as the application limits are discussed.

Results of numerical simulations of high-altitude aerothermodynamics of the EXPERT reentry capsule along its descent trajectory are presented. Aerodynamic characteristics for different angles of attack and rolling of the capsule at altitude of 150 down to 20 km are studied. An engineering local bridging method is used in computations. The uncertainty of the engineering method in the transitional regime is determined by comparisons with results obtained by DSMC simulations. I. Introduction During disorbiting, the spacecraft experiences the influence of the atmosphere with significantly varying parameters. To estimate the aerodynamic loads and to predict the landing area, one should know, already at the stage of design, the coefficients of aerodynamic forces and moments of the spacecraft for varying temperature, density, flight velocity, and angles of attack and sideslip for numerous possible descent trajectories. Thousands of various variants have to be computed. At the beginning of descent, at high altitudes where the gas is strongly rarefied, numerical simulations do not involve many difficulties, because theoretical approaches have been developed for simple shapes and the Test Particle Monte Carlo method can be readily used for more complicated shapes. On the other hand, various engineering approaches have been developed for calculating aerodynamic characteristics of various bodies at the final segment of the descent trajectory, in the continuum regime, which are fairly effective. The main problem is the analysis of spacecraft aerodynamics in the transitional regimes between the free-molecular and continuum regimes. The Navier-Stokes equations yield, strictly speaking, incorrect results in the transitional regime and require special modifications for taking into account flow slipping. The Direct Simulation Monte Carlo (DSMC) method provides rather accurate values of aerodynamic characteristics with allowance for physical and chemical processes but requires large amounts of computer memory and performance. Application of the software based on the DSMC method is unreasonably expensive at the initial stage of spacecraft design and trajectory analysis. A possible solution of this problem is the approximate engineering methods. These methods allow calculating aerodynamic characteristics of bodies of arbitrary geometry for multiple variants of free-stream parameters within a reasonable time and then to refine the results at the most important segments of the flight trajectory by the DSMC method. The use of fast approximate engineering methods is the most acceptable approach to solving problems of spacecraft aerodynamics at the stage of conceptual design. The present paper describes the computations of aerodynamics of the EXPERT capsule by an engineering local bridging method at altitudes of 150 down to 20 km with flow parameters corresponding to the expected descent trajectory. The results in the transitional regime are refined by the DSMC method. The errors of the engineering method are studied in detail, and the contribution of various elements of the EXPERT capsule to aerodynamic characteristics is analyzed. II. EXPERT geometry The KHEOPS configuration (Fig. 1) is a blunted pyramidal shape featuring four flaps. The computational model was constructed by the RuSat software system. The total number of panels is approximately 36 thousand. The nose is made in the form of an ellipse with a misalignment of 0.9165. The local radius of the nose part is 0.6 m. The ellipse-cone junction is described by a clothoid. The conical body has a cone angle of 12.5°. The cone is truncated by planes at an angle of 8.35° to the axis of symmetry. Four control flaps are deflected by 20 °.

The analytic equations of mass flow rate for gas flow in microchannels or microtubes developed in the 1990s have been widely validated by experimental results for slow-speed flow, but the applicability for high-speed flow might be constrained. A new model for analyzing the modified Navier–Stokes equations of the gas flow in 2D microchannels and microtubes is proposed in this study, named the simplified quasi-2D (SQ2D) model. The applicability of the SQ2D model can be in the range from slow-speed flow to high-speed flow with no-slip boundary conditions or high-order slip boundary conditions. The flows in 2D microchannels and microtubes, with hydraulic diameters sized from 5 µm to 100 µm and various hydraulic-diameter-to-length ratios, were analyzed by the SQ2D model under different pressure conditions. The mass flow rates calculated by the SQ2D model meet the data computed by the computational fluid dynamics-based method better than the analytic equations in the high Mach number region. The results were also compared with the numerical or experimental data from other studies, good agreements could be reached. Some particular characteristics of micro gas flow were also identified and briefly discussed with the data computed by the SQ2D model.

Early onset of flow separation with rarefied gas flowing in a 90° bend tube

The lattice Boltzmann (LB) method has been used to simulate rarefied gas flows in micro-systems as an alternative tool, and shown its application possibility. For the rarefied gas flows, the surface roughness plays an important role for the slip phenomenon at the wall. If the wall surface is sufficiently rough, the reflection of the molecules will be diffuse and the tangential momentum accommodation coefficient (TMAC) is equal to unity. However, it has been known that the reflections are not always fully diffuse. In this study, rarefied gas flows are simulated in the slip and the transition flow regime including the effect of the TMAC. For the simulations, new non-fully diffuse wall boundary treatments of the LB method are proposed. The results of 2D and 3D simulations are in excellent agreement with the analytical solutions for the slip flow regime. The solutions of the linearized Boltzmann equation and DSMC for the transition flow regime are compared with those of high order LB method with present boundary conditions, and they are in excellent agreement. The tangential momentum accommodation coefficient effect is also investigated.

Rarefied gas flows in rough microchannels are investigated by non-equilibrium molecular dynamics simulations. The surface roughness is modelled by an array of triangular modules. The Maxwell slip model is found to break down due to the surface roughness for gas flows in microchannels with large surface roughness. Non-Maxwell slippage shows that the slip length is smaller than that predicted by the Maxwell model and is nonlinearly related to the mean free path. For larger surface roughness and smaller Knudsen number, the non-Maxwell effect becomes more pronounced. The boundary conditions, generally including velocity slip, no-slip and negative slip, depend not only on the Knudsen number but also on the surface roughness. Simulation results show that A/λ ≈ 1 is a good criterion to validate the no-slip boundary condition and A/λ > 0.3 can be a criterion to judge the occurrence of non-Maxwell slippage, where A is the surface roughness size and λ is the mean free path of gas molecules. The permeability enhanced by the surface roughness may be responsible for the roughness-induced non-Maxwell slippage.

This paper describes the basic study of the simulation of chemical vapor deposition (CVD) step coverage that is used to estimate the deposition of thin films in LSI production. Given the trend toward extremely high density in the semiconductor manufacturing process, such as that of LSIs, the deposition process of silicon thin film on the circuit pattern needs to be accurate. To optimize the deposition of thin film around the trench of the order of less than a micron, computer simulations of the step coverage and of the film growth rate in the process are very important. In this simulation reported in this paper, the thin film deposition process, whose reaction is modeled as silicon from silane (SiH4) and silylene (SiH2), is solved using the direct simulation Monte Carlo (DSMC) method. The DSMC method is usually adopted in this case, but, since 1) this method solves the Boltzmann equation with a huge amount of molecular collisions and free motions and 2) sticking probability of molecules is of the order of 10-5 [1], even a high performance computer needs much time for this calculation. Although the performance of supercomputers and other types of computers is improving, the DSMC method as conventionally applied seems to be reaching its limit in terms of practicality.