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  • https://doi.org/10.1109/icsens.2013.6688584Copy DOI Icon

Resolution of sensors with capacitive source impedance

  • Nov 1, 2013
  • Yik R Teo +1 more
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Abstract

Piezoelectric and electrostatic based sensors are commonly used to measure pressure, acceleration, strain and force. These sensors can be modeled as a voltage source in series with a capacitive source impedance. There is a misconception that these sensors have infinitesimal resolution. This work describes the noise sources that contribute to the resolution of sensors with capacitive source impedances. The power spectral density (PSD) of each relevant noise source is derived in order to estimate the resolution. Expressions for the root-mean-square (RMS) and peak-to-peak noise are developed. These expressions are experimentally verified by estimating the resolution of a sensor with a 10 nF capacitance and 100 MΩ leakage resistance. The estimated resolution of 390 mV compares well with the measured resolution of 420 mV.

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