Self-Powered, Highly Sensitive, and Flexible Humidity Sensor Based on Carboxymethyl Cellulose for Multifunctional Applications.

Flexible humidity sensors composed with electrodes of laser induced graphene and sputtered sensitive films derived from poly(ether-ether-ketone)

Flexible humidity sensors have received more and more attention in people's lives, and the problems of gas permeability and power supply issues of the device have long been areas in need of improvement. In this work, inspired by the high air permeability of daily wear clothing and galvanic batteries, a self-powered humidity sensor with high air permeability and fast response is designed. A nylon fabric/GO net (as a humidity sensitive layer and solid electrolyte) is obtained by spraying technique. This structure enables the sensor to have fast response/recovery (0.78s/0.93s, calculated at 90% of the final value), ultra-high response (0.83V) and excellent stability (over 150 cycles) at 35°C. Such sensors are useful for health monitoring, such as non-contact monitoring of human respiratory rate before and after exercise, and monitoring a level of humidity in the palms, arms, and fingers. This research provides an idea for developing a flexible wearable humidity sensor that is both breathable and self-powered and can also be mass-produced similar to wearable clothing.

The utilization of printing techniques for the development of high-performance humidity sensors holds immense significance for various applications in the fields of the Internet of Things, agriculture, human healthcare, and storage environments. However, the long response time and low sensitivity of current printed humidity sensors limit their practical applications. Herein, a series of high-sensing-performance flexible resistive-type humidity sensors is fabricated by the screen-printing method, and hexagonal tungsten oxide (h-WO3 ) is employed as the humidity-sensing material due to its low cost, strong chemical adsorption ability, and excellent humidity-sensing ability. The as-prepared printed sensors exhibit high sensitivity, good repeatability, outstanding flexibility, low hysteresis, and fast response (1.5s) in a wide relative humidity (RH) range (11-95%RH). Furthermore, the sensitivity of humidity sensors can be easily adjusted by altering the manufacturing parameters of the sensing layer and interdigital electrode to meet the diverse requirements of specific applications. The printed flexible humidity sensors possess immense potential in various applications, including wearable devices, non-contact measurements, and packaging opening state monitoring.

The humidity sensor is an essential sensing node in medical diagnosis and industrial processing control. To date, most of the reported relative humidity sensors have a long response time of several seconds or even hundreds of seconds, which would limit their real application for certain critical areas with fast-varying signals. In this paper, we propose a flexible and low-cost humidity sensor using vertically aligned carbon nanotubes (VACNTs) as electrodes, a PDMS-Parylene C double layer as the flexible substrate, and graphene oxide as the sensing material. The humidity sensor has an ultrafast response of ~20 ms, which is more than two orders faster than most of the previously reported flexible humidity sensors. Moreover, the sensor has a high sensitivity (16.7 pF/% RH), low hysteresis (<0.44%), high repeatability (2.7%), good long-term stability, and outstanding flexibility. Benefiting from these advantages, especially the fast response, the device has been demonstrated in precise human respiration monitoring (fast breathing, normal breathing, deep breathing, asthma, choking, and apnea), noncontact electrical safety warning for bare hand and wet gloves, and noncontact pipe leakage detection. In addition, the facile fabrication of the flexible platform with the PDMS-Parylene C double layer can be easily integrated with multisensing functions such as pH sensing, ammonium ion sensing, and temperature sensing, all of which are useful for more pattern recognition of human activity.

Strip-type flexible capacitive humidity sensor based on composite of polyimide and poly(glycidyl methacrylate): Fabrication, humidity sensitive performance and potential for detecting water content in liquids

Flexible humidity sensors have attracted substantial attention due to the promising application in medical health monitoring. Up to now, the realization of such devices with ultrafast response/recovery and controllable morphology via a facile and cost-effective approach still remains a severe challenge. Herein, a high-performance flexible capacitive humidity sensor by creating the arc-shaped hollow structure with the poly(vinylidenefluoride-co-trifluoroethylene) [P(VDF-TrFE)] nanocone arrays is developed. Particularly, a facile method based on combining the hot-pressing method and the anodized aluminum oxide template transfer method is proposed to realize the large-scale preparation of the nanostructure arrays with controllable morphology. Benefiting from the open arc-shaped hollow structure and the large-area P(VDF-TrFE) nanocone arrays, the proposed humidity sensor shows several conspicuous features, such as ultrafast response/recovery time (3.693/3.430 s), long-term stability (25 days), excellent bending stability (10,000 cycles), unaffected capacitance response to humidity in a certain temperature range (20−50℃) and high selectivity toward water vapor. The above salient superiorities enable the proposed humidity sensor to be successfully utilized in extraction of a variety of physiological signals including breathing detection, skin noncontact sensing, and real-time monitoring of diaper wetting process and skin humidity, which reveals great potential value in prevention and diagnosis of many diseases.

A self-powered PVA-based flexible humidity sensor with humidity-related voltage output for multifunctional applications

Developing a facile, cost-saving, and environment-friendly method for fabricating a multifunctional humidity sensor is of great significance to expand its practical applications. However, most humidity sensors involve a complex fabrication process, resulting in their high cost and narrow application fields. Herein, a multifunctional paper-based humidity sensor with many advantages is proposed. This humidity sensor is fabricated using conventional printing paper and flexible conductive adhesive tape by a facile pasting method, in which the paper is used as both the humidity-sensing material and the substrate of the sensor. Owing to the moderate hydrophilicity of the paper and the rational structure design of the paper-based humidity sensor, the sensor exhibits an excellent humidity-sensing response of more than 103 as well as good linearity ( R2 = 0.9549) within the humidity range from 41.1 to 91.5% relative humidity. Furthermore, the paper-based humidity sensor has good flexibility and compatibility, endowing it with multifunctional applications for breath rate, baby diaper wetting, noncontact switch, skin humidity, and spatial localization monitoring. Although the resistance of the paper-based humidity sensor is relatively large, the humidity-sensing response signals of the sensor can be conveniently processed by the designed signal processing system. The readily available starting materials and facile fabrication technique provide useful strategies for the development of multifunctional humidity sensors.

Humidity sensors based on flexible sensitive nanomaterials are very attractive in noncontact healthcare monitoring. However, the existing humidity sensors have some shortcomings such as limited sensitivity, narrow relative humidity (RH) range, and a complex process. Herein, we show that a tin sulphide (SnS) nanoflakes-based sensor presents high humidity sensing behaviour both in rigid and flexible substrate. The sensing mechanism based on the Schottky nature of a SnS-metal contact endows the as-fabricated sensor with a high response of 2491000% towards a wide RH range from 3% RH to 99% RH. The response and recovery time of the sensor are 6 s and 4 s, respectively. Besides, the flexible SnS nanoflakes-based humidity sensor with a polyimide substrate can be well attached to the skin and exhibits stable humidity sensing performance in the natural flat state and under bending loading. Moreover, the first-principles analysis is performed to prove the high specificity of SnS to the moisture (H2O) in the air. Benefiting from its promising advantages, we explore some application of the SnS nanoflakes-based sensors in detection of breathing patterns and non-contact finger tips sensing behaviour. The sensor can monitor the respiration pattern of a human being accurately, and recognize the movement of the fingertip speedily. This novel humidity sensor shows great promising application in physiological and physical monitoring, portable diagnosis system, and noncontact interface localization.

Flexible humidity sensors for wireless monitoring based on electrospun sulfonated polyether ether ketone (SPEEK) nanofibres

Highly sensitivity and wide-range flexible humidity sensor based on LiCl/cellulose nanofiber membrane by one-step electrospinning

In this study, we fabricated a highly flexible fiber-based capacitive humidity sensor using a scalable convergence fiber drawing approach. The sensor’s sensing layer is made of porous polyetherimide (PEI) with its porosity produced in situ during fiber drawing, whereas its electrodes are made of copper wires. The porosity induces capillary condensation starting at a low relative humidity (RH) level (here, 70%), resulting in a significant increase in the response of the sensor at RH levels ranging from 70% to 80%. The proposed humidity sensor shows a good sensitivity of 0.39 pF/% RH in the range of 70%–80% RH, a maximum hysteresis of 9.08% RH at 70% RH, a small temperature dependence, and a good stability over a 48 h period. This work demonstrates the first fiber-based humidity sensor fabricated using convergence fiber drawing.

Flexible humidity sensing and portable applications based on MoSe2 nanoflowers/copper tungstate nanoparticles

Flexible humidity sensors have attracted widespread attentionfortheir potential applications in telemedicine, motion detection, etc.Compared with conventional humidity sensors, flexible humidity sensorshave advantages in flexibility, integration, and portability. However,reported flexible humidity sensors usually suffer from a low response,complex manufacturing processes, and poor stability. We fabricatea humidity sensor using a graphene/polymer composite as the sensitivematerial with a focus on improving the response and simplifying themanufacturing process. Then, we optimize the performance of the preparedflexible sensor by component design. The prepared flexible humiditysensor has a response of 1123%, and response and recovery times of61.1/92.0 s, respectively, showing excellent humidity sensing performance.The human respiration, skin humidity field, and environmental humiditydetection applications are successfully realized by the humidity sensor.Besides, the contactless gesture monitoring is accomplished by thehumidity sensor array, demonstrating the potential for further developmentinto healthcare and contactless human–machine interaction.

ABSTRACTFlexible surface acoustic wave (SAW) based temperature and humidity sensors were fabricated and characterized. ZnO piezoelectric films were deposited on polyimide substrates by DC magnetron sputtering. ZnO films possess (0002) crystal orientation with large grain sizes of 50∼70 nm. SAW devices showed two wave modes, namely the Rayleigh and Lamb modes, with the frequencies at fR ∼132MHz and fL∼427MHz respectively for a wavelength of 12 μm device. The two resonant frequencies have a temperature coefficient of frequency (TCF) of −423ppm/K and −258ppm/K for the Rayleigh and Lamb waves, respectively. The SAW sensors exhibited a good repeatability in responding to cyclic change of humidity. The responses of the sensors increase with the increase in humidity, and the sensitivity increases with the decrease in wavelength. A high sensitivity of 34.7 kHz/10%RH has been obtained from a SAW device without any surface treatment, demonstrated that the flexible SAW humidity sensors are very promising for application in flexible sensors and microsystems.