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  • https://doi.org/10.1299/jsmemecj.2022.f221-03Copy DOI Icon

Stretchable Micro-devices towards Digital Transformation

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Abstract

In recent years, the demand for digital transformation (DX) in the industrial sector has been extremely high. In response to this high demand, a variety of smart devices have been invented and offered. Especially in the research field, flexible or bendable smart devices have been devised by using thin-film polymers such as polyimide and parylene as substrates. Micro/nanofabrication is a fundamental technology in the research and development of these smart devices. The presenter's laboratory has conducted research on flexible smart devices for social implementation based on micro/nanofabrication. Based on the knowledge obtained from flexible smart devices, we have also studied stretchable devices, which are expected to be the next generation of smart devices. In this presentation, we report an overview of our research on flexible smart devices and stretchable systems. In particular, we present our research on flexible smart devices and the development of smart devices for use in medical and animal experiments. In addition, research on stretchable sensors using liquid metal and stretchable systems are reported. Stretchable devices based on micro- and nano-fabrication might be further accelerated toward social implementation in the future.

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