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  • 應用視覺於TFT-LCD陣列電路工程中瑕疵辨識之研究-畫素電極光罩瑕疵自動分類
  • https://doi.org/10.6840/cycu.2007.00354Copy DOI Icon

應用視覺於TFT-LCD陣列電路工程中瑕疵辨識之研究-畫素電極光罩瑕疵自動分類

  • Jan 1, 2007
  • 鄧凱元
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Abstract

就目前的面板製程而言,所有的製程流程都在無塵室內進行,廠區也將外在環境的影響降至最低,但多數的面板在輸送過程和存放的時候仍會因為異物的掉落或是基台故障等因素,導致產品出現缺陷。例如面板上的電極在生成時因異物存在而導致斷路,或是在面板運送時被機器手臂刮傷等等,這些缺陷若不處理會在螢幕上出現亮/暗點或亮/暗線,又或許出現不規則形狀的亮度不均Mura。這些有異常的面板如果是在液晶胞工程時才被發現的話,能做的修補很有限又或許是直接判為次級品降價出售。這對面板廠商而言即是成本的消耗,但若在陣列電路工程中發現的話,不但修補較為容易,且可以即時對出問題的機器進行調整。故提高面板的良率,不但可以降低生產成本並增加公司獲利,且減少有瑕疵的面板對公司的聲譽也有不少的助益,故對面板廠商而言是最重要的目標。 為了增加良率,多數的公司都設有檢查部門,主要是當製程進行到某一個階段時進行人工的瑕疵分類工作,以防止較大的錯誤繼續發生。但是為了降低人為誤判的影響以及增加處理的速度,以達到全檢的目標,將整個檢查系統自動化是必須的。 本論文的目標即是發展一個自動化瑕疵分類系統。藉由融合各種數位影像處理、統計紋理特徵抽取以及類神經網路辨識和支持向量機器等方法,針對檢查機台所拍攝的瑕疵影像進行自動即時分類,以利產品良率的提升。本研究主要是針對檢查機台於陣列電路工程中、第五道光罩(畫素電極光罩)微影製程後所拍攝到的瑕疵影像進行分析與辨識,發展了一個『畫素電極光罩中微影製程瑕疵影像辨識系統』。此系統可以對六種常見的瑕疵影像(GE殘、SE殘、SD殘、源電極斷路、異物和PE2連)進行分類,讓瑕疵分類達到自動化、即時化。

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