The Temperature Structure of NGC 7027

Inductively coupled plasmais widely used in semiconductor and display process because of its desirable characteristics such as high plasma density, simple structure and independently controllable ion energy. The driving frequency is a significant parameter that generates and maintains the plasma. However, the effects of different driving frequencies on the radial distribution of the plasma parameters are hardly investigated. So a large area cylindrical inductively coupled plasma source driven separately by 2 MHz and 13.56 MHz is investigated. In order to perform a comprehensive investigation about the effect of driving frequency, the radially resolved measurements of electron density, electron temperature and density of metastable state atoms for the argon discharge are systematically analyzed by Langmuir double probe and optical emission spectroscopy at various power values and gas pressures. It is found that input power values at high frequency (13.56 MHz) and low frequency (2 MHz) have different effects on plasma parameters. When discharge is driven at high frequency, the electron density increases obviously with the increase of power. However, when discharge is driven at low frequency, the electron temperature increases evidently with the increase of power. This can be explained by calculating the skin depths in high and low frequency discharge. When the discharge is driven at high frequency, the induced electromagnetic field is higher than that at low frequency, and the single electron obtains more energy. It is easier to ionize, so the energy is mainly used to increase the electron density. When the discharge is driven at low frequency, the skin layer is thicker, the number of heated electrons is larger, and the average energy of electrons is increased, so the energy is mainly used to raise the electron temperature. At a gas pressure of 10 Pa, the electron density shows a ‘convex’ distribution and increases with the increase of input power for both the high-frequency and low-frequency discharge. While the distributions of electron temperature are obviously different. When the discharge is driven at high frequency, the electron temperature is relatively flat in the center of the chamber and slightly increases on the edge. When the discharge is driven at low frequency, the electron temperature gradually decreases along the radial position. This is due to the one-step ionization in the high-frequency discharge and the two-step ionization in the low-frequency discharge. In order to prove that the low-frequency discharge is dominated by two-step ionization, the spectral intensities of the argon plasma under the same discharge conditions are diagnosed by optical emission spectroscopy. The number density of metastable states is calculated by the branch ratio method. The results are consistent with the analyses. At a gas pressure of 100 Pa, the electron density increases and then decreases with the increase of radial distance, and the overall distribution shows a " saddle shape” for high frequency and also for low frequency discharge. Although the uniformity of electron density improves with the gas pressure, the uniformity at low frequency is better than that at high frequency. The reason can be attributed to the fact that the skin layer of low frequency is thicker and the heating area is wider.

Introduction to ionospheric physics, international geophysics series: Henry Rishbeth and Owen K. Garriott (Editors): Vol. 14. Academic Press, New York and London, 1969. vii + 331 pp. $16.00 149 s

Spectroscopic and thermometric measurements were performed on the hafnium cathode in argon plasma at atmospheric pressure in a stable burning mode of the arc. The distribution of temperatures on the cathode and distribution of electron temperatures in plasma near the cathode are presented. It was shown that the obtained theoretical range of values for the voltage drop in the volume charge layer is in good agreement with experimental results. Based on the numerical simulations, a range of values were obtained for the current densities of ions and electrons and electric field strength on the cathode tip.

This work reports the measurement of two-dimensional electron properties over a nanosecond scale integration time across a femtosecond laser-induced plasma filament in atmospheric pressure argon. Radial electron properties across the ∼100\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\sim 100$$\\end{document} μ\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\upmu$$\\end{document}m diameter filament are obtained at discrete axial locations at 2.5 mm steps by one-dimensional high-resolution laser Thomson scattering with a spatial resolution of 10 μ\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\upmu$$\\end{document}m. These measurements reveal plasma structural information in the filament. The Thomson spectral lineshapes exhibit clear spectral sidebands with an α\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\alpha$$\\end{document} parameter ∼1\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\sim 1$$\\end{document}, enabling the measurement of both electron temperature and density profiles. These measurements yield electron densities on the order of 1022\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$10^{22}$$\\end{document}/m3\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$^{3}$$\\end{document} and electron temperatures of ∼2\\documentclass[12pt]{minimal} \\usepackage{amsmath} \\usepackage{wasysym} \\usepackage{amsfonts} \\usepackage{amssymb} \\usepackage{amsbsy} \\usepackage{mathrsfs} \\usepackage{upgreek} \\setlength{\\oddsidemargin}{-69pt} \\begin{document}$$\\sim 2$$\\end{document} eV. Heating from the probe laser due to inverse bremsstrahlung is taken into account to correct the Thomson scattering electron temperature measurements. Under these conditions, electron-neutral collision induced bremsstrahlung becomes the dominant laser-induced plasma heating process associated with the probe laser. The measurements reveal structural features of the filament, including an asymmetrically skewed density structure in the axial direction and reversed radial distributions of electron density and temperature.

Characterization of remote N2 plasma by various techniques

Spatially resolved probe measurements of the electron energy distribution function (EEDF) in a capacitive rf discharge in argon reveal that the electron temperature decreases with increasing plasma heating rf field. This paradoxical behavior in the electron temperature distribution in an inhomogeneous rf field is shown to be the combined effect of nonlocal electron kinetics and a non-Maxwellian EEDF typical of a low pressure capacitive rf discharge in a Ramsauer gas.

This paper contains results of numerical and experimental investigation of glow discharge plasma created in a chamber of a new-type large-volume coaxial gridded hollow cathode. The discharge is created in argon at 25 Pa by applying time-varying power with frequency 20 kHz on electrodes. A 2-D model of the discharge was built using COMSOL Multiphysics. Self-consistent description of the discharge was obtained using the extended fluid approach, which couples continuity equations for charged particles and electron energy balance with Poisson's equation for electric potential. Electron transport coefficients and rates of electron-impact reactions were calculated using the electron energy distribution function. The spatial and radial distributions of plasma potential (V p ), electron density (n e ), and electron temperature (T e ) were obtained. It is shown that the plasma inside the chamber is similar to the negative glow of a dc glow discharge. Comparison of numerical results with the Langmuir probe measurements of electron density and electron temperature is presented and showed a good agreement.

We propose a new theoretical method to study galvanomagnetic effects in bounded semiconductors. The general idea of this method is as follows. We consider the electron temperature distribution and the electric potential as consisting of two terms, one of which represents the regular solution of the energy balance equation obtained from the Boltzmann transport equation at steady-state conditions and the Maxwell equation, while the other is the effect of the specimen size that is significant near the contacts (the boundary layer function). With the distribution of the electric potential at the contacts and the electron temperature distribution at the surface of the sample taken into account, we find that the magnetoresistance is different from the one in the standard theory of galvanomagnetic effects in boundless media. We show that, besides the usual quadratic dependence on the applied magnetic field B, the magnetoresistance can exhibit a linear dependence on B under certain conditions. We obtain new formulas for the linear and quadratic terms of the magnetoresistance in bounded semiconductors. This linear contribution of the magnetic field to the magnetoresistance is essentially due to the spatial dependence of the potential at the electric contacts. We also discuss the possibility of obtaining the distribution of the electric potential at the contacts from standard magnetoresistance experiments. Because the applied magnetic field acts differently on carriers with different mobilities, a redistribution of the electron energy occurs in the sample and thus, the Ettingshausen effect on the magnetoresistance must be considered in bounded semiconductors.

Transient model is used to analyze the dynamic development processes of vacuum arc, which is necessary especially under the high frequency vacuum arc. In this paper, the transient magneto-hydrodynamic of vacuum arc is established. The commercial software FLUENT is used to solve mass conservation equation, momentum conservation equation, conservation equation of ion energy, conservation equation of electron energy and magnetic field transport equation. The distribution of ion pressure, ion velocity, ion temperature and electron temperature will be discussed under different frequency, current and materials. With the rising of frequency, the unsteady terms in the function increase obviously, which greatly affect the development processes of the vacuum arc. The maximum current that a small-size trigger tube can carry is limited by its size. The current mainly influences the joule heating and the boundary condition at cathode size. The increase of current leads to the increase of the distribution of ion pressure and temperature. The influence of different materials is mainly due to the difference of the ion mass. Larger relative atomic mass results in higher ion pressure and lower ion temperature and electron temperature under the same mean charge number.

Electron density and temperature distributions in the H-1 heliac plasma are measured using the helium line intensity ratio technique based on a collisional-radiative model. An inversion approach with minimum Fisher regularization is developed to reconstruct the ratios of the local emission radiances from detected line-integrated intensities. The electron density and temperature inferred from the He I 667.8/728.1 and He I 728.1/706.5 nm line ratios are in good agreement with those from other diagnostic techniques in the inner region of the plasma. The electron density and temperature values appear to be a little high in the outer region of the plasma. Some possible causes of the discrepancy in the outer region are discussed.

Summary form only given. We have investigated the spatiotemporal behavior excited Xe atoms density in the 1s <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> metastable states by laser absorption spectroscopy and electron temperature by emission spectroscopy, respectively, in accordance with various barrier ribs and xenon contents. The maximum density of excited Xe atoms in the 1s <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">5</sub> in discharge cell with stripe type and closed type barrier rib have been measured to be 1.28 x 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> and 1.45 x 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-3</sup> , respectively. In this experiment, the maximum value of excited Xe atoms density is not different much in different ribs. However, the distribution with spatiotemporal behavior is more uniform in the closed type barrier rib than stripe type rib. Throughout this experiment, we could understand influence of barrier rib and xenon contents on the excited xenon density and electron temperature in micro discharge cell.

A novel sputtering method based on a triode-sputtering set-up is presented. This low vacuum plasma method enables sputtering of thin films at a pressure range of: 0. 2&minus;5 mTorr, using a gas discharge support. The new method is capable of independent control of the sputtering rate vs. sputtering voltage.<br> Temperature distribution of electrons in the plasma was experimentally studied using the Langmuir probe. Electron temperature was found to be maximal along the plasma plane. Experimental sputtering results of Ti, Si layers, using this method, are described. Obtained sputtering rates for Ti and Si were 60 A&#176;/min and 100 A&#176;/min respectively.

The effect of a transverse magnetic field on spatial electron temperature Te distribution along the line joining the center of capacitively driven rectangular discharge plates, operated at 13.56 MHz in a push-pull configuration, has been presented. It is found that the electron temperature distribution is almost uniform at low operating pressure (1 Pa). However, as the background pressure increases, the electron temperature tends to peak near the discharge plates. The overall magnitude in Te is also found to increase throughout the volume on account of increasing the background pressure. This experimental observation has been qualitatively depicted by COMSOL Multiphysics® fluid simulation. A plausible explanation has been given to explain the rise in Te due to the combined effect of the magnetic field and background pressure in this setup.

The role of inert gas in MW-enhanced plasmas for the deposition of nanocrystalline diamond thin films

X-ray emission characterization provides valuable insights about electron cyclotron resonance (ECR) plasmas. In principle, space-resolved spectroscopic techniques can be used to reveal spatial distributions of electron density and temperature. In the PANDORA (Plasma for Astrophysics, Nuclear Decay Observation, and Radiation for Archaeometry) project framework, and within the collaboration between the Atomki and INFN-LNS laboratories, we developed a high-resolution full-field x-ray pinhole setup. This setup incorporates advanced analysis techniques for single photon counted imaging in high dynamical range mode, enabling x-ray imaging and space-resolved spectroscopy at high spatial and energy resolution (560 μm and 242 eV @ 8.1 keV, respectively). Here, we introduce an innovative technique for quantitatively evaluating the local electron density and temperature of plasma, as the first application of such a method in an ECR setup. Specifically, we examine an argon plasma heated by 200 W microwave power at 14 GHz. Our analysis includes a retrospective comparison with past x-ray data collected from other ECR ion source setups. Our findings clearly reveal the formation of a plasmoid–halo structure within the plasma chamber, characterized by a dense and hot plasma almost totally enclosed inside the ECR magnetic iso-surface (the plasmoid). This plasmoid exhibits nearly uniform distribution of electron density and temperature, with only gentle gradients of both the parameters toward its edges. Inside the halo, x-ray emission is minimal or even negligible. Notably, cusp structures correspond to magnetic branches where deconfined electrons impinge upon the plasma chamber walls and endplates. The average values of temperature and density measured inside the plasmoid are 12.44±1.84 keV and (1.66±0.15)×1017 m−3, respectively.