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Theoretical study of the depletion-layer capacitance in abrupt p–n semiconductor junctions

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Abstract

For evaluation of capacitance-voltage measurements on an abrupt pn semiconductor junction with reverse-biased depletion layer an approximation equation for the quantity Ue is presented, where Ue is the value at the intercept of the extrapolated plot C−2 to the applied voltage axis. The approximation formula is compared with an exact calculation. The maximum error in the approximate relationship for Ue is less than 3% in a wide range of impurity density and applied reverse voltage, therefore the discrepancy in the space-charge layer capacitance Cs is less than 1.5%. Cs is given by the relationship, which follows from Shockley's theory, if (U + UD) is replaced by (U + Ue). Für die Auswertung von Kapazitätsmessungen an abrupten pn-Übergängen, die in Sperrich-tung belastet sind, wird eine Näherungsbeziehung für die Größe Ue entwickelt, wobei Ue die Spannung am Schnittpunkt der extrapolierten Kurve C−2 mit der Spannungsabszisse U darstellt. Die Näherungslösung wird mit den Werten einer exakten numerischen Rechnung verglichen. Der maximale Fehler bei der approximierten Größe Ue liegt in einem weiten Dotierungsbereich und Sperrspannungsbereich unter 3%, so daß die Abweichungen bei der Sperrschichtkapazität Cs kleiner als 1,5% sind. Man kann Cs durch die Beziehung nach der Shockleyschen Theorie beschreiben, wenn man (U - UD) durch (U + Ue) ersetzt.

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