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Three-dimensional microstructure measurement by high-resolution fringe analysis for shadow moiré image by SEM

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Abstract

A new fringe analysis for shadow moire new fringe analysis for shadow moire using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moire fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moire fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm). using a SEM is proposed in order to perform a high resolution 3-D shape measurement. Two sheets of shadow moire fringe images are grabbed by shifting the grating using PZT. One sheet of deformed shadow of grating image which does not include any original grid image is reconstructed from two shadow moire fringe images by using the new method. In experiments, a sphere that is a bearing ball(diameter:700μm) was measured by the method. The standard deviation of the difference between the measured result and the ideal shape as the sphere was 95nm. From the results, it was confirmed that the proposed method had not only a high measuring accuracy but also a spatial high-resolution power(330nm).

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