Three-dimensional shape measurement of aspheric mirrors with null phase measuring deflectometry

This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.

Phase measuring deflectometry (PMD) is a robust, noncoherent technique for the characterization of specular surface. For measuring high specular reflectivity surface, PMD can deliver micron radian range local gradient. However, when the measured surface has low specular reflectivity, the accuracy of the measured gradient is low since the captured fringe pattern shows low signal to noise ratio. The phase error characteristics in PMD system when testing low reflectivity surfaces are analyzed. The analysis illustrates that the random phase error increases rapidly while the nonlinear error drops slowly with the decreasing of the tested surface reflectivity. In order to attain high precision measurement of low reflectivity specular surface, a robust error reduction method based on wavelet de-noising is proposed to reduce the phase error. This error reduction method is compared with several other normally used methods in both simulation and experiment work. The method based on the wavelet de-noising shows better performance when measuring the low reflectivity specular surface.

This paper proposes a new shearing approach to eliminate the systematic errors in phase measuring deflectometry (PMD). Besides a normal measurement using PMD, another three measurements are taken when the test surfaces are translated and rotated with an amount of known magnitude in our proposed method. The four measurements give three sheared wavefronts, and then the difference Zernike polynomial fitting and a least squares algorithm are proposed to reconstruct the true test surface figure. The proposed method is demonstrated and verified through computer simulation and experimental results. The error propagation when the sheared wavefronts include random noise and the introduced errors due to the incorrect shearing values are both analyzed.

In phase measuring deflectometry (PMD), the fringe pattern deformed according to slope deviation of a specular surface is digitized employing a phase-shift technique. Without height-angle ambiguity, carrier-removal process is adopted to evaluate the variation of surface slope from phase distribution when a quasi-plane is measured. This paper investigates nonlinear carrier components introduced by the generalized imaging process in PMD and the nonlinear carrier removal methods. To remove the nonlinear carrier components in PMD, the reference subtraction technique, series-expansion technique and Zernike polynomials which are normally used in fringe projection profilometry are analyzed on accuracy, processing time and experimental simplicity. What’s more, a new nonlinear carrier removal technique is proposed according to the analytical expression of carrier phase. The theoretical analysis and the experiment results show that the new technique is accurate, simple and time-saving.

Phase measuring deflectometry (PMD) is a well-established method for determining the topography of specular freeform surfaces. A disadvantage of the classical PMD method, however, is the sequential measurement process - it requires at least six camera images of phase-shifted sinusoidal fringe patterns for one measurement. Therefore, for moving objects in industrial production, as well as for non-fixable objects such as the human cornea, the classical PMD evaluation is not suitable anymore. To overcome this problem, single-shot methods using single-side-band demodulation have been presented, which allow for a deflectometric measurement based on just one single image capture. However, this kind of evaluation does not work for complex surface geometries that result in broadband fringe patterns, since the phase is only considered globally in the Fourier space. A new single-shot evaluation method for the phase determination using the Continuous Wavelet Transform (CWT) is presented. The advantage of the wavelet transform is that the signal can be evaluated locally in both spatial and frequency space, making it possible to measure even complex reflective surfaces in motion. First measurement results are shown and compared to the classic phase-shifting evaluation for a non-moving object. Furthermore, limits and possible enhancements of this new method are discussed. Phase measuring deflectometry (PMD) is a well-established method for determining the topography of specular freeform surfaces. A disadvantage of the classical PMD method, however, is the sequential measurement process - it requires at least six camera images of phase-shifted sinusoidal fringe patterns for one measurement. Therefore, for moving objects in industrial production, as well as for non-fixable objects such as the human cornea, the classical PMD evaluation is not suitable anymore. To overcome this problem, single-shot methods using single-side-band demodulation have been presented, which allow for a deflectometric measurement based on just one single image capture. However, this kind of evaluation does not work for complex surface geometries that result in broadband fringe patterns, since the phase is only considered globally in the Fourier space. A new single-shot evaluation method for the phase determination using the Continuous Wavelet Transform (CWT) is presented. The advantage of the wavelet transform is that the signal can be evaluated locally in both spatial and frequency space, making it possible to measure even complex reflective surfaces in motion. First measurement results are shown and compared to the classic phase-shifting evaluation for a non-moving object. Furthermore, limits and possible enhancements of this new method are discussed.

Phase Measuring Deflectometry (PMD) and Structured-Light Modulation Analysis Technique (SMAT) perform effectively in shape and defect measurements of specular objects, but the difficulty of giving consideration to accuracy and speed has also restricted the further development and application of them. Inspired by recent successes of deep learning techniques for computational imaging, we demonstrate for the first time that deep learning techniques can be used to recover high-precision modulation distributions of specular surfaces from a single-frame fringe pattern under SMAT, enabling fast and high-quality defect detection of specular surfaces. This method can also be applied to recover higher-precision phase distributions of specular surfaces from a single-frame fringe pattern under PMD, so as to realize the 3D shape measurement. In this paper, we combine depthwise separable convolution, residual structure and U-Net to build an improved U-Net network. The experimental results prove that the method has excellent performance in the phase and modulation retrieval of specular surfaces, which almost reach the accuracy of the results obtained by ten-step phase-shifting method.

Fringe projection profilometry (FPP) and phase measuring deflectometry (PMD) are the currently popular technologies for measuring diffuse and specular reflective surfaces respectively. Both methodologies demonstrate superior performance for single-type reflective surfaces. However, with the rapid development of advanced manufacturing and intelligent manufacturing technologies, products have seen significant improvements in complexity, diversity, and personalization, often exhibiting composite reflective characteristics on their surfaces. The aforementioned single technology cannot meet the measurement requirements for composite reflective surfaces. To address this challenge, this paper presents a composite reflective surfaces measurement method combining FPP with PMD techniques, and an optimized system calibration method based on binocular stereo vision is proposed to enhance the system's measurement accuracy. To improve the measurement efficiency, a strategy in which the LCD screen and projector project different colorful fringe patterns simultaneously is adopted. To mitigate stray light interference from the projector on specular surface profilometry, a partition projection method is presented. Instead of establishing the pixel mapping relationship between the projector and diffused surface aeras, the coordinate mapping relationship between the specular reflective region and the projector pixel is established according to the phase-height relationship to realize the accurate projection of the projector to the diffused surface. Experiments have been performed to validate the proposed method, and the results demonstrate that it can reconstruct the composite surfaces with higher accuracy. In particular, the reconstruction accuracy of specular surface can reach several tens of nanometres.

Geometry calibration is a critical step for phase measuring deflectometry (PMD) system. Generally, a circle grid, a chessboard, or a group of fringes is used to determine the camera pose during the calibration. There are two main problems with using a circle grid or a checkerboard for geometry calibration: incomplete pattern capturing and uneven gray value distribution. For fringe patterns, the camera needs to take many images of the reflected patterns. This paper proposes a new geometry calibration method for PMD system, which combines square-based fiducial markers with a marker-less flat mirror. The proposed method can accomplish the calibration in the case the captured calibration patterns are incomplete and have uneven gray value distribution, and only require to take a minimum of three images. Experiment shows the proposed method can get accuracy calibration result simple and flexible.

Projector nonlinearity is a common problem for digital structured light-based three-dimensional (3-D) shape measurement techniques. A temporal-spatial binary encoding method is presented for the purpose of eluding it. We build a 3-D shape measurement scheme by combining our proposed method with phase measurement profiling. A standard sinusoidal fringe pattern is divided into more than two binary fringe patterns using specially designed temporal and spatial binary encoding rule based on intensity hierarchic quantification, and then are in-focus projected onto the measured object at a time sequence to reconstruct a frame phase-shifting fringe image. On account of the projected binary fringe pattern strictly consisting of zeros and ones, the influence of the projector nonlinearity on the measurement result can be effectively ruled out and simultaneously enables high-quality sinusoidality. In-depth investigations by theoretical analysis and experiments are conducted to demonstrate the performance of this method.

Despite the availability of various Process Analytical Technologies (PAT) for measuring other particle properties, their inherit limitations for the measurement of crystal shape have been restricted. This has impacted, in turn, on the development and implementation of optimisation, monitoring and control of crystal shape and size distributions within particle formulation and processing systems In recent years, imaging systems have shown to be a very promising PAT technique for the measurement of crystal growth, but still essentially limited as a technique only to provide two-dimensional information. The idea of using two synchronized cameras to obtain 3D crystal shape was mentioned previously (Chem Eng Sci 63(5) 1171–1184, 2008) but no quantitative results were reported. In this paper, a methodology which can directly image the full three-dimensional shape of crystals has been developed. It is based on the mathematical principle that if the two-dimensional images of an object are obtained from two different angles, the full three-dimensional crystal shape can be reconstructed. A proof of concept study has been carried out to demonstrate the potentials in using the system for the three-dimensional measurement of crystals.

Light-in-Flight recording by holography makes it possible to perlorm accurate three-dimensional shape measurements by single-line contouring. Because ultrashort light pulses are used, both stationary and moving objects may be recorded, e.g., fast-rotating turbine blades, mobile scale models, active human beings, etc. The evaluation is accomplished by an image processing system that reads the contouring line that varies along the hologram and transforms it into spatial coordinates, thereby measuring the three-dimensional shape. There are a number of possible application areas of the method, ranging from practical engineering to medicine.

The conventional phase-shifting techniques commonly suffer from frequency aliasing because of their number of phase shifts below the critical sampling rate. As a result, fringe harmonics induce ripple-like artifacts in their reconstructed phase maps. For solving this issue, this paper presents an anti-aliasing phase-measuring technique. Theoretical analysis shows that, with phase-shifting, the harmonics aliased with the fundamental frequency component of a fringe signal depend on the greatest common divisor (GCD) of the used phase shifts. This fact implies a possibility of removing such aliasing effects by selecting non-uniform phase shifts that together with 2π have no common divisors. However, even if we do so, it remains challenging to separate harmonics from the fundamental fringe signals, because the systems of equations available from the captured fringe patterns are generally under-determined, especially when the number of phase shifts is very few. To overcome this difficulty, we practically presume that all the points over the fringe patterns have an identical characteristic of harmonics. Under this constraint, using an alternate iterative least-squares fitting procedure allows us to estimate the fringe phases and the harmonic coefficients accurately. Simulation and experimental results demonstrate that this proposed method enables separating high order harmonics from as few as 4 fringe patterns having non-uniform phase shifts, thus significantly suppressing the ripple-like phase errors caused by the frequency aliasing.

We propose to use a calibration target with a narrow spectral color range for the background (e.g., from blue) and broader spectral color range for the feature points (e.g., blue + red circles), and fringe patterns matching the background color for accurate phase extraction. Since the captured fringe patterns are not affected by the high contrast of the calibration target, phase information can be accurately extracted without edging artifacts. Those feature points can be clearly "seen" by the camera if the ambient light matches the feature color or without the background color. We extract each calibration pose for three-dimensional coordinate determination for each pixel, and then establish pixel-wise relationship between each coordinate and phase. Comparing with our previously published method, this method significantly fundamentally simplifies and improves the algorithm by eliminating the computational framework estimate smooth phase near high-contrast feature edges. Experimental results demonstrated the success of our proposed calibration method.

Specular reflection compensation in homography fringe projection profilometry

Binary coding methods have been widely used for three-dimensional (3D) shape measurement. However, traditional binary coding methods always require a sequence of binary patterns to encode the fringe order. This paper presents a spatial-temporal binary coding (STBC) method for 3D shape measurement with three binary patterns, including a spatial pattern and two temporal patterns. Specifically, the spatial pattern is used to encode a 4-bit spatial code, and the temporal patterns are used to encode the 2-bit temporal code. By combining the spatial code and the temporal code, 6-bit code words can be obtained that distinguish 26=64 fringe periods of sinusoidal phase-shifting patterns. A robust dual-region labeling decoding scheme is also developed to extract the 6-bit code word for fringe order determination, and then absolute-phase unwrapping can be carried out. Experiments have been conducted, and their results confirm that the STBC method can reliably reconstruct the 3D shapes of measured objects with only three binary patterns.