- Book Chapter
- 10.1016/b978-0-12-822103-7.00007-8
Chapter 7 - Metal oxides and metal thin films by atomic layer deposition (ALD), liquid-ALD, and successive ionic layer adsorption and reaction methods for THR applications
- Jan 01, 2020
- Energy Saving Coating Materials
- Hongfei Liu + 1 more +1
6