- Research Article
1
- 10.1364/optcon.548085
Scalable fabrication of erbium-doped high-Q silica microtoroid resonators via sol-gel coating
- Feb 19, 2025
- Optics Continuum
- Riku Imamura + 3 more +3
This study explores sol-gel methods for fabricating erbium-doped silica microtoroid resonators, addressing the limitations of conventional doping techniques and enhancing device scalability. We develop a reproducible sol-gel process that yields defect-free films for photonic applications and detail common defects and troubleshooting strategies. Two fabrication methods are compared: traditional film deposition on substrates and the direct coating of prefabricated resonators. The latter enables the fabrication of larger resonator diameters (up to 450 µm) without buckling while achieving a high-Q factor and a low lasing threshold of 350 µW. These erbium-doped resonators exhibit multi-mode laser oscillations at 1550 nm, revealing the sol-gel method’s potential for realizing scalable, gain-doped photonic devices.
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