PNDetector (Germany)

Journal Article Combine 4D STEM and EELS Using a Fast Pixelated Direct Detector with Center Hole Get access M Huth, M Huth PNDetector GmbH, München, Germany Corresponding author: bjoern.eckert@pndetector.de Search for other works by this author on: Oxford Academic Google Scholar B Eckert, B Eckert PNDetector GmbH, München, GermanyUniversity of Siegen, Department of Physics, Siegen, Germany Corresponding author: bjoern.eckert@pndetector.de Search for other works by this author on: Oxford Academic Google Scholar S Aschauer, S Aschauer PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar E Hedley, E Hedley University of Oxford, Department of Materials, Oxford, United Kingdom Search for other works by this author on: Oxford Academic Google Scholar P Nellist, P Nellist University of Oxford, Department of Materials, Oxford, United Kingdom Search for other works by this author on: Oxford Academic Google Scholar P Majewski, P Majewski PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar L Strüder, L Strüder University of Siegen, Department of Physics, Siegen, GermanyPNSensor GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar H Soltau H Soltau PNDetector GmbH, München, Germany Search for other works by this author on: Oxford Academic Google Scholar Microscopy and Microanalysis, Volume 29, Issue Supplement_1, 1 August 2023, Pages 401–402, https://doi.org/10.1093/micmic/ozad067.188 Published: 22 July 2023

The 100 m long X-ray test facility (100XF for clarity) in Institute of High Energy Physics of CAS has been playing an increasingly important role in the X-ray astronomy field in China. 100XF has been contributing to the missions under development, such as the Einstein Probe mission. The facility has also been providing support to R&D of focusing X-ray optics in China that will enable future X-ray telescopes to be realized, such as the enhanced X-ray Timing and Polarization (eXTP) mission. A pnCCD-based camera has been employed at 100XF to rapidly measure the performance of the X-ray optics. In this work, we study the performance of the camera and its spectral and imaging applications at 100XF. The camera system can provide a high frame readout rate, with a low readout noise <3 e−. It is sensitive to X-ray photons in the 3–10 keV energy band with a high quantum efficiency exceeding 90%. Actually, the low threshold of detection energy range can reach down to 0.2 keV. The energy resolution can reach 145.2 eV for single events and 154.8 eV for all valid events (including single events and split events) at 6.4 keV. The camera also exhibits excellent imaging capability in both the full frame mode and the windowing mode, with a readout rate of up to 1000 Hz. Finally, a prototype of a focusing X-ray mirror shell of eXTP was smoothly measured with this camera. The obtained on-axis point-spread function and half-power diameter are consistent with expectations. It is proven that the camera can improve the capability of 100XF in characterizing the X-ray optics. This camera will be very useful for performing on-ground calibrations for future X-ray telescope missions.

264 x 264 pixels with a 48 m pitch can be used as a detector with an equivalent of over 4200 x 4200 pixels. This enables the flexibility to change the data rate and resolution of the camera without making any physical adjustments to the pnCCD. This flexibility is achieved entirely through software, using an understanding of charge distribution within the pnCCD and careful post processing and reconstruction of each X-ray event. We will present this method in detail, along with laboratory applications of sub pixels resolution.

In scanning transmission electron microscopy (STEM), one can obtain a variety of STEM images such as bright‐field (BF) and annular dark‐field (ADF) STEM images by changing the shape of the scintillator. However, the intensity distribution of convergent beam electron diffraction (CBED) patterns at the detector plane is yet to be fully utilized. Meanwhile, direct electron detectors with fast frame rate have recently been commercialized and used in electron microscopy. Such detectors, when used for recording CBED pattern images for each STEM probe position, are called pixelated STEM detectors. With the obtained 4‐dimensional (4D) dataset, any shape of STEM detector can be synthesized in a post processing by a free selection of the integration area. Therefore, we can synthesize variety of STEM images such as differential phase contrast (DPC) and annular bright field (ABF) images, if we once record the image signal with a pixelated detector. The 4D dataset can also be used for the advanced image processing techniques such as ptychography, which has been shown to provide high efficiency for reconstructing the phase image of an object [1,2]. Using ptychography, not only the phase contrast can be enhanced but also the effect of lens aberrations to the image such as defocus can be corrected by the post processing using the information collected by a pixelated detector. Experiments were performed using an aberration corrected microscope (JEOL JEM‐ARM200F) equipped with a pixelated detector (pnDetector pnCCD), the fast direct electron detector, which can record images at a speed of 1,000 fps in a full frame mode (264 x 264 pixels). Binning or windowing can increase the speed. The camera was placed below the ADF detector to enable simultaneous recording. Figure 1 shows STEM images of a monolayer graphene obtained at 80 kV. Fig. 1a shows an ADF image obtained with the probe current of approximately 0.2 pA and the dwell time for a pixel of 0.5 ms. Because of a combination of low dose and residual uncorrected aberrations, the lattice contrast of graphene is almost buried in the noise originated from 50 Hz commercial frequency. Fig. 1b shows a reconstructed phase image using ptychography. The image contrast is significantly improved compared to the simultaneous ADF image, but the contrast transfer of the image (see the Fourier transform displayed in the inset) is anisotropic, resulting in uncertain positions of carbon atoms. This is because there remains large two‐fold astigmatism and defocus in the image shown in Fig. 1(b), because we could not adjust those by observation of the ADF image due to the weak image signal. Fig. 1c is a phase image in which the aberrations are corrected through post processing using the same 4D dataset by applying correction functions in the spatial frequency domain. The image is no longer anisotropic and the carbon atomic positions can be unambiguously determined. Although the same amount of electron dose is used to form the ADF and the corrected phase images, the result clearly shows the benefit of ptychographic phase reconstruction in improving image signal to noise and being able to correct aberrations through post processing. Figure 2 shows the ptychographic phase maps of the 4D dataset at a certain spatial frequency. With an aberration‐free electron probe, they would be flat phase on the two sidebands, and the phase difference between the bands be π. In Fig. 2a, the map of the original dataset, there is a phase gradient inside each sideband because the aberrations were present in the electron probe. Fig. 2b is the correction function that compensates for the aberration seen in Fig. 2a. Fig. 2c is the corrected phase map and corresponding to the image in Fig. 1c. Here, only defocus and two‐fold astigmatism are corrected but corrections of other higher order aberrations are in principle possible. Figure 3 shows through focus images created in the same way as above. As we know the full information on the electron wave at the condenser aperture plane, we can induce any aberrations such as defocus.

We report on a new camera that is based on a pnCCD sensor for applications in scanning transmission electron microscopy. Emerging new microscopy techniques demand improved detectors with regards to readout rate, sensitivity and radiation hardness, especially in scanning mode. The pnCCD is a 2D imaging sensor that meets these requirements. Its intrinsic radiation hardness permits direct detection of electrons. The pnCCD is read out at a rate of 1,150 frames per second with an image area of 264 x 264 pixel. In binning or windowing modes, the readout rate is increased almost linearly, for example to 4000 frames per second at 4× binning (264 x 66 pixel). Single electrons with energies from 300 keV down to 5 keV can be distinguished due to the high sensitivity of the detector. Three applications in scanning transmission electron microscopy are highlighted to demonstrate that the pnCCD satisfies experimental requirements, especially fast recording of 2D images. In the first application, 65536 2D diffraction patterns were recorded in 70 s. STEM images corresponding to intensities of various diffraction peaks were reconstructed. For the second application, the microscope was operated in a Lorentz-like mode. Magnetic domains were imaged in an area of 256 x 256 sample points in less than 37 seconds for a total of 65536 images each with 264 x 132 pixels. Due to information provided by the two-dimensional images, not only the amplitude but also the direction of the magnetic field could be determined. In the third application, millisecond images of a semiconductor nanostructure were recorded to determine the lattice strain in the sample. A speed-up in measurement time by a factor of 200 could be achieved compared to a previously used camera system.